20
④
To begin processing, follow the procedure in (1).
7. RUNNING PROCEDURE
Running Procedure
3
）
Machine stopping procedure
Stop the machine by the following procedure:
⑤
Set the machine in the standby state.
⑥
Turn off the operation power.
⑦
Turn off the circuit breaker.
The power may be turned off in any state. The purpose of turning off the power in the standby
state is to open the chamber to the atmospheric pressure to enable the door to be opened
closed any time. To keep the chamber in the vacuum state, stop the machine in the order of
PR
OCESS → START → vacuum reaches about 20 Pa → operation power off → circuit breaker
off.
4
）
Motion when a power failure occurs
If the power fails, all motion stops and the status of motion is not stored. When the power is
re-covered, the controller will display the initial screen for several seconds and the machine will
enter the standby status. The following procedure is the same as the normal running procedure.
5
）
Motion when an alarm occurs
(The causes of alarms and corrective actions are listed on page 23.)
①
If an abnormal situation occurs, the buzzer sounds and the alarm state is shown on the touch
panel.
②
Check the problem and take corrective actions.
(The buzzer can be stopped with the BUZZER OFF key.)
Summary of Contents for PDC610
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