26
7. RUNNING PROCEDURE
Touch Panel Operation
（
8
）
Alarm condition setting screen
Set conditions to issue alarms on this screen.
（
9
）
Parameter setting screen
Set the maximum flow rates of the mass flow controller, ultimate vacuum when filling gas, time to
add N2 gas after operation of the pressure switch for purge (an operation to ensure that the
chamber is returned to atmospheric pressure which may be under negative pressure when the
pressure switch operates) and processing gas stability time. Once they have been set, they need
not be set again for normal run.
①
Using the numeric keys, enter a
value to a place where the cursor is
blinking.
②
After entering a value, press the
ENT key. If the ENT key is not
pressed,
the
previous
value
re-mains unchanged. When the
ENT key is pressed, the cursor
moves to the next item. Enter a
value similarly. If a wrong value has
been entered, press the CLR key to
clear it.
③
After the entry, press the SELECT
key to return to the SELECT
screen.
④
The default values and
input ranges
are as follows.
Param. No.
1
2
3
4
5
6
7
Default value
20
10
20
10
20
3
2
Input range
1
～
50
1
～
60
1
～
50
1
～
60
1
～
100
1
～
30
1
～
10
①
Using the numeric keys, enter a
value to a place where the cursor is
blinking.
②
After entering a value, press the
ENT key. If the ENT key is not
pressed,
the
previous
value
re-mains unchanged. When the
ENT key is pressed, the cursor
moves to the next item. Enter a
value similarly. If a wrong value has
been entered, press the CLR key to
clear it.
③
After the entry, press the SELECT
key to return to the SELECT screen.
④
The default values are as follows.
Item
Ｏ
2
gas
Ar gas
N
2
add time
Stable
time
Attained vacuum
level
Japanese/English
Default
200
100
5
30
10
0
Summary of Contents for PDC610
Page 40: ...37 13 WIRING DIAGRAM...
Page 41: ...38 13 WIRING DIAGRAM...
