Yamato PDC610, Instruction Manual

Page 1: ...ead this instruction manual and the warranty thoroughly After reading the manual please keep it together with the warranty in a safe place where it is available any time necessary WARNING Prior to usi...

Page 2: ...IS USED 11 WHEN 2 STAGE ELECTRODE IS USED INSTALLATION OF ELECTRODES 12 WHEN 2 STAGE ELECTRODE IS USED RIE MODE 13 WHEN 2 STAGE ELECTRODE IS USED DP MODE 14 WHEN 3 STAGE ELECTRODE IS USED INSTALLATIO...

Page 3: ...12 SPECIFICATIONS 36 SPECIFICATIONS 36 ACCESSORY LIST 36 13 WIRING DIAGRAM 37 14 Piping Diagram 39 15 Parts List 40 16 DISPOSAL 41 PRECAUTIONS FOR DISPOSAL 41 17 LIST OF HAZARDOUS SUBSTANCES 42...

Page 4: ...require hospitalization or outpatient visits for a long time Note 2 Minor injury means a wound or an electrical shock that does not require hospitalization or outpatient visits for a long time Note 3...

Page 5: ...ger High temperature Danger Moving part Danger Hazard of explosion Caution General cautions Electrical shock Burning Prohibitions General bans Do not disassemble Do not touch Compulsions General compu...

Page 6: ...tion are a cause of failure fire electric shock and other accidents 5 Handling of the power cords Do not use bundled power cords Such a way of use may cause the cords to overheat to cause a fire Do no...

Page 7: ...nt temperature rises above 35 A place where temperature changes largely A place filled with dust or a humid place A place under direct sunlight A place that is subjected to vibrations 3 Install the ma...

Page 8: ...c parts Cleaning of optical parts dies machine parts and other precision parts Modification of fluoride or other resin surfaces Application of the DP mode This mode is used to clean objects whose soil...

Page 9: ...ady to run Emergency stop switch Press this button when an emergency situation occurs When this button is pressed the RF power vacuum pump and opera tion panel power are turned off To reset the button...

Page 10: ...uments Vacuum nozzle Connect the vacuum pump with the attached flexible tube Nitrogen N2 gas connector Connect piping from the N2 gas cylinder Adjust the pressure to the range of 0 2 MPa to 0 3 MPa Ar...

Page 11: ...ser The machine requires an electric capacity of 3 phase 200 VAC differ depending on the region See page 19 15 A or more Connect the red white and black cables to the R S and T phases respectively The...

Page 12: ...electrode x 2 Feed through connecting plate used for three stage configuration RIE fixing clamp for shelf board electrode used for 3 stage configuration DP fixing clamp for shelf board electrode used...

Page 13: ...connected here Shelf board electrode slide pin This is used when earthing from a source other than the included power cord or for earthing measuring devices Upper electrode slide rail Connected to the...

Page 14: ...screws M4 6 At this time install M4 6 truss screws included to the screw points of the upper feed through that is not used DP mode Connect the feed through and the upper electrode with the upper elect...

Page 15: ...on of electrodes Insert the upper electrode into the slide rail Install the lower electrode onto the bottom of the chamber Install shelf board electrode slide pins into the screw holes in the middle o...

Page 16: ...ws M4 6 Install the RIE fixing clamp for shelf board electrode at the point of the shelf board electrode shown in the diagram below Flat head screw M4 5 Insert the shelf board electrode into the chamb...

Page 17: ...stall the DP fixing clamp for shelf board electrode at the point of the shelf board electrode shown in the diagram below Truss screw M4 6 Insert the shelf board electrode into the chamber and connect...

Page 18: ...electrode into the slide rail Install the lower electrode onto the bottom of the chamber Install shelf board electrode slide pins into upper and lower screw holes on each of shelf pegs CAP bolts M4 1...

Page 19: ...M4 8 Install the RIE fixing clamp for shelf board electrode at the point of the shelf board electrode shown in the diagram below Insert the shelf board electrode into the chamber and connect it to th...

Page 20: ...all the DP fixing clamp for shelf board electrode at the point of the shelf board electrode shown in the diagram below Truss screws M4 6 Insert the shelf board electrode into the chamber and connect i...

Page 21: ...on ranges If they need not be changed from the previous setting they need not be set Set the work in the chamber and close the door Press the START key The controller automatically performs the follow...

Page 22: ...sma clean the work by the following procedure 1 When the processing parameters need not be set Set the work in the chamber and close the door Press the AUTO Screen key Press the START key The controll...

Page 23: ...in the order of PROCESS START vacuum reaches about 20 Pa operation power off circuit breaker off 4 Motion when a power failure occurs If the power fails all motion stops and the status of motion is n...

Page 24: ...stalled on the operation panel is pressed the power to the touch panel RF and vacuum pump is turned off To return the machine to the running status use the following procedure Remove the cause of the...

Page 25: ...eens are configured as follows The arrow indicates the lower level screens Initial Screen 1 Initial screen This screen will appear automatically when the power is turned on While this screen is being...

Page 26: ...RECIPE Displays the PROCESS SETUP screen ALARM Displays the ALARM screen SELECT Displays the SELECT screen AUTO MEAS screen Displays selected recipe conditions When you enter the secret number in the...

Page 27: ...umeric keys enter a value to a place where the cursor is blinking After entering a value press the ENT key If the ENT key is not pressed the previous value re mains unchanged When the ENT key is press...

Page 28: ...n 6 ALARM HISTORY 7 RECIPE SELECT Returns to the ALARM screen Clears alarm history Touching the RECIPE No displays the ten keyboard After entering a value using numbers press the READ key The data wil...

Page 29: ...unchanged When the ENT key is pressed the cursor moves to the next item Enter a value similarly If a wrong value has been entered press the CLR key to clear it After the entry press the SELECT key to...

Page 30: ...and RF keys are not accepted Using the numeric keys enter a value to a place where the cursor is blinking After entering a value press the ENT key If the ENT key is not pressed the previous value re...

Page 31: ...is no problem Shows the ultimate vacuum after 20 minutes OK when below 10 Pa The valve of the evacuating line is closed and the chamber is closed completely 20 minutes after the start of evacuating L...

Page 32: ...Operation 13 SECRET NO INQUIRY 14 SECRET NO REGISTER The screen is used to register a secret number Enter a four digit secret number This is a screen for inquiry of the secret number After entering t...

Page 33: ...fire or electric shock may occur Never try to repair the machine by yourself It is a very dangerous practice 3 Dry the work If the work is wet a very long evacuating time is required which may cause...

Page 34: ...5 to 0 2 MPa Purge gas 0 2 to 0 3 MPa 4 Gas connect port Gas leak No gas leak 5 Vacuum exhaust connect port Tightness Not loose 6 Commercial in put line Connection No loose connectors No abnormal temp...

Page 35: ...d by No Place Method Criteria Result Remarks 1 Retighten connection screws All motion at a stop Not loose 2 Retighten piping joints All motion at a stop Not loose 3 Replace O rings All motion at a sto...

Page 36: ...Supply the process gas to ensure the vacuum in the chamber is in the range of 100 Pa to 1 Pa P28 Evacuating time over Plasma is not produced because the vacuum is too high or low Supply the process g...

Page 37: ...panel Remove the right panel Make sure that RF is OFF before removing the panel Set the AUTO MANUAL selector switch VC1 and VC2 to the MANU side Turn the MANUAL position adjustment VC1 and VC2 counte...

Page 38: ...er date of purchase and other information are described correctly and keep the warranty in a safe place The warranty period is one year from the date of purchase During this period failures will be re...

Page 39: ...0 SC 1 4 inch flare less joint Accessory list No Part name Qty No Part name Qty 1 Main unit PDC610 1 18 Lower electrode 1SET 2 Operation manual plain paper 1 copy 19 Upper electrode 1SET 3 Operation m...

Page 40: ...37 13 WIRING DIAGRAM...

Page 41: ...38 13 WIRING DIAGRAM...

Page 42: ...G BOX CHAMBER CAPACITANCE MANOMETER FILTER VACUUM SW V 1 PIPING SYSTEM DIAGRAM N2 GAS TOUCH PANEL SEQUENCER TS1 THERMOSTAT FILTER S PS1 PE1 V 3 S V 2 V 4 S V5 M O2 GAS S COOLING FAN MASS FLOW CONTROLL...

Page 43: ...ulating collar 1 LT00028350 Ceramics YAMATO Insulating collar LT00028351 Teflon YAMATO Electrode LT00028386 Aluminum YAMATO Inner cover lower on the back LT00028239 Aluminum YAMATO Inner cover upper o...

Page 44: ...ajor components of the main unit Enclosure Stainless steel SUS304 Chamber door Aluminum A5052 Insulating plate Ceramics Check window Heat resistant reinforced glass Pilex Piping piping joint SUS304 SU...

Page 45: ...um perchlorate and other per chlorates Potassium peroxide sodium peroxide barium peroxide and other inorganic perox ides Potassium nitrate sodium nitrate ammonium nitrate and other nitrates Sodium chl...

Page 46: ...pt operations or actions which are prohibited in this manual Such a practice may become a cause of unexpected accidents and failures Notice This instruction manual is subject to change without notice...