30
8. PRECAUTIONS FOR HANDLING
Warning and Caution
1. Substances that must not be used
Do not use explosive substances, flammable substances and other substances containing
such substances with this machine. They are a cause of explosion and fire. (See 17
. “List of
Hazardous Substances”)
2. Prohibition of use and corrective actions in the event of abnormal situations
This machine incorporates a high-frequency power supply. If you notice smoke or offensive
odor or other abnormalities, immediately turn off the machine power and the distribution panel
power and request the dealer or Yamato Scientific sales office for inspection. If the machine is
left as it is, a fire or electric shock may occur. Never try to repair the machine by yourself. It is
a very dangerous practice.
3.
Dry the work
If the work is wet, a very long evacuating time is required, which may cause the evacuation
alarm. Also water may deposit in the vacuum pump to deteriorate the evacuating
performance. Be sure to dry the work prior to plasma cleaning.
4
．
Do not bring the work in contact with the chamber
The work in contact with the chamber causes a short circuit between the electrode and the
chamber, which may damage the work and the machine. Place the work above the electrode
and provide a clearance of more than 20 mm between the chamber and the work.
5.
Attention to high temperature when taking out work
When taking out the work from the chamber, be careful not to touch the chamber and
elec-trode because the inside of the chamber may be very hot.
Summary of Contents for PDC610
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