36
12. SPECIFICATIONS
SPECIFICATIONS
Model
PDC610
Ma
in
un
it
Power supply
200 - 230 VAC 15A 50/60 Hz (Vacuum pump included)
Internal dimensions of
chamber
(Width) 350 × (depth) 270 × (height) 300 mm
Electrode structure
Parallel flat type (Plasma mode: RIE/DP change-over type)
Electrode dimensions
(Width) 250 ×(depth) 220 mm three stages
Plasma method
RIE
／
DP change-over type
Vacuum meter
Capacitance manometer
Control device
Sequencer
Operation/display unit
5 inch STN color LCD touch panel
Hi
gh
-fr
eq
ue
nc
y
po
wer
s
up
p
ly
High-frequency
output
power
100
– 600W
Reference oscillator
Quartz oscillator
Oscillation frequency
13.56 MHz
Output setting method
Manual setting on the touch panel
Matching method
Auto tuning
V
ac
uu
m
pump
Model
Alcatel T2021
Effective exhaust speed
345 L/min
（
50 Hz
）
Suction port shape
NW25
Exhaust port shape
NW25
Motor rated output
450 W
（
50 Hz
）
G
as
s
y
s
tem
Purge gas
N
2
1/4-inch flare-less joint
Reaction gas
Ar gas Mass flow controller 100 SCCM
1/4-inch flare-less joint
O
2
gas Mass flow controller 100 SC
1/4-inch flare-less joint
Accessory list
No
Part name
Qty
No
Part name
Qty
1
Main unit(PDC610)
1
18
Lower electrode
1SET
2
Operation manual
（
plain paper
）
1 copy
19
Upper electrode
1SET
3
Operation manual
（
dust-free paper
）
1 copy
20
Shelf board electrode
2SET
4
Operation manual of vacuum pump
1 copy
21
Lower electrode fixing clamp
1
5
Operation manual for capacitance
manometer
1 copy
22
Upper electrode fixing clamp
1
6
Operation manual for vacuum
pump
1 copy
23
Feed through connecting plate
（
used
for 3-stage configuration
）
1
7
Operation manual for mass flow
controller
1 copy
24
Shelf board electrode RIE fixing
clamp
（
used for 2-stage configuration
）
1
8
Warranty card
1 copy
25
Shelf board electrode DP fixing clamp
（
used for 2-stage configuration
）
1
9
Use of high frequency wave
1 copy
26
Shelf board electrode RIE fixing
clamp
（
used for 3-stage configuration
）
2
10
High frequency wave
1 copy
27
Shelf board electrode DP fixing clamp
（
used for 3-stage configuration
）
2
11
High frequency wave
1 copy
28
Truss screw
（
M4×6
）
15
12
Power cord
（
for vacuum pump
）
1
29
Truss screw
（
M4×8
）
5
13
Vacuum pump
（Ｔ
2021SD
）
1
30
Flat head screw
（
M4×5
）
10
14
Oil mist eliminator
1
15
Clamp
3
16
Center ring
3
17
Flexible tube
1
Summary of Contents for PDC610
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Page 41: ...38 13 WIRING DIAGRAM...
