6
4. COMPONENTS AND FUNCTIONS
Main Unit
Front of the machine
①
Door
：
This door is manually opened sideways.
②
Grip
：
Used to open and close the door.
③
Check window
：
This window is used to check plasma status.
④
Touch panel
：
Used to operate various keys and show various information.
⑤
Operation power switch
：
When this button is pressed, electricity is applied to the touch
panel and other parts of the machine to set the machine ready
to run.
⑥
Emergency stop switch
：
Press this button when an emergency situation occurs. When
this button is pressed, the RF power, vacuum pump and opera-
tion panel power are turned off. To reset the button, turn it in
the arrow direction.
⑦
Earth leakage breaker
：
When this breaker is turned on, electricity is applied to the
machine. If leakage exceeding 30 mA or overcurrent exceeding
16 A flows, it cuts off the current to protect the machine.
⑦
-1
Test button
：
Use
this
during
periodic inspections to
check if the earth
leakage breaker is
functioning properly.
⑦
-2
Leakage
indicator
：
When leakage occurs,
this button pops out.
①
③
②
④ ⑥ ⑤ ⑦
⑦-1 ⑦-2
Summary of Contents for PDC610
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Page 41: ...38 13 WIRING DIAGRAM...
