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16. DISPOSAL
Precautions for Disposal
For protection of the global environment:
In order to protect the environment, it is requested that when disposing of the machine, break
down the machine to as smallest pieces as possible and dispose of them by materials or recycle
them wherever possible. The major components of the machine and their materials are as
follows.
Major Component
Material
Major components of the main unit
Enclosure
Stainless steel (SUS304)
Chamber, door
Aluminum (A5052)
Insulating plate
Ceramics
Check window
Heat-resistant reinforced glass (Pilex )
Piping, piping joint
SUS304
、
SUS316
Suction/exhaust valve
Aluminum A6063
、
SUS316
Major components of the electrical system
Switch, relay
Resin, copper and other composite materials
PC board
Glass fiber and other composite materials
Power cord
Synthetic rubber coating, copper, nickel and
other composite materials
Wiring
Glass fiber, flame retardant vinyl, copper,
nickel and other composite materials
Seal
Resin-based materials
Summary of Contents for PDC610
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