YOKOGAWA CSU-X1 User Manual Download

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Table of contents

1 Safety

Precautions .......................................................................................................3

1.1 Introduction...........................................................................................................3
1.2 Caution ..................................................................................................................3
1.3 History...................................................................................................................3
1.4 General

Safety Precautions..................................................................................4

2 Product

Overview.........................................................................................................7

2.1 Product

overview...................................................................................................7

3 Before

Using the Unit ..................................................................................................8

3.1 Packing List ..........................................................................................................8
3.2 Before Use .............................................................................................................9

3.2.1 Safety

Precautions .........................................................................................9

3.2.2 General

precautions on handling..................................................................9

3.3 Installation.......................................................................................................... 10

3.3.1 Installation requirements............................................................................ 10
3.3.2 Connection

of equipment............................................................................. 11

3.3.3 Application of Power.................................................................................... 13

4 Name

and

function..................................................................................................... 14

5 Maintenance............................................................................................................... 17

5.1 Filter

exchange.................................................................................................... 17

6 Specification ............................................................................................................... 19

6.1 Specification ........................................................................................................ 19

6.1.1 Specification

of filter wheel ......................................................................... 19

6.1.2 Environment ................................................................................................ 19
6.1.3 Conformity ................................................................................................... 20
6.1.4

Global Environment Action............................................................................ 20

6.2

Model and Suffix Code (MS Code)...................................................................... 21

6.3 Dimension

of CSUX1FW .................................................................................... 22

6.4 Control

Signal ..................................................................................................... 23

7 Warranty .................................................................................................................... 24