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6.6.6.4. Optimising a high probe current (nA)
A probe current can have a halo round the center which significantly decreases the performance
in terms of sputter rate and steepness of the side walls of a cross section.
If you cannot remove the halo by standard aperture alignment, use the defocus option.
Procedure:
1
Adjust the probe current as described in section 6.6.6.3.
2
Go to
FIB Control/Align
3
Set the defocus value:
a
Double-click in the
Mill Defocus =
field.
Image
Comment
The ion beam is focussed, resulting in
- an optimum imaging resolution but
- the sputter rate is low due to the large halo.
The focus voltage is reduced by -60 V resulting in
- poor image quality, but
- the sputter rate is increased due to the elimination of the halo and
- high current density.
The focus voltage is reduced by -120 V, both imaging and milling are of
poor quality.
Table 6.2: Spot files
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
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Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
