ZEISS
6 Operation | 6.2 Obtaining a First Image
2. To change the position of the scan frame, click on the green border line and use the mouse
to drag and drop the frame.
3. To change the size of the scan frame, click on the small blue squares on the green border
line and drag them to the desired size.
4. Focus the image in the reduced raster.
6.2.7.4 Aligning the Aperture
1. In the Crossbeam SEM Control panel, select the Control tab.
2. In the
Alignment
section, click
Focus Wobble
.
INFO:
Focus wobble is a function that sweeps the acceleration voltage. If the aperture is
misaligned, a lateral and vertical shift can be observed.
à
The
Focus Wobble
window is displayed.
3. To adjust the wobble intensity, use the
Wobble Amplitude
scroll bar.
4. To accelerate the wobble speed, activate the
Wobble Fast
checkbox.
5. In the
Control
tab, click
Aperture
.
6. In the
Aperture Align
navigation box, use the scroll bars or the red marker to adjust the
aperture alignment until there is no movement of the detail in X- and Y-direction.
INFO
: The specimen detail should just be pulsating without shifting.
7. In the
Focus Wobble
window, click
OFF
to deactivate focus wobble.
à
The
Focus Wobble
window closes.
8. Refocus the image.
6.2.7.5 Selecting the Scan Speed
1. In the
Toolbar
, from the
Faster/Slower
drop-down list, select
Scan Speed = 7
.
Alternatively, in the Crossbeam SEM Control panel, select the Imaging tab, and from the
Scan Speed
drop-down list, select
Scan Speed = 7
.
à
The scan speed is set to
Scan Speed = 7
.
2. Bring the image into focus.
6.2.7.6 Correcting Astigmatism
1. Ensure that the
Reduced Raster
function is active.
2. Select a detail (e.g. a mark or an edge) on the specimen surface.
Ensure that the selected detail is in the raster. You can move the stage or shift the beam for
this purpose.
3. In the Crossbeam SEM Control panel, select the Control tab.
4. Click Stigmator.
5. In the
Stigmation
navigation box, use the scroll bars or the red marker to obtain the
sharpest possible image.
INFO:
The specimen detail should just be pulsating without shifting.
INFO:
To obtain optimum results, alternately correct focus and astigmatism.
6. To deactivate the reduced raster, in the
Toolbar
, click the Reduced Raster/Apertures icon.
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
73
