OPERATION IN EXPERT MODE
LSM 510
DuoScan
Carl Zeiss
Macro Menu
LSM 510 META
DuoScan
4-200
B 45-0021 e
03/06
(4)
Calibrating Routine
•
When clicking on the
Calibrate
button in the
Profile & Stack Stitching
window the
Calibrate...
window opens.
Calibrate Rotation Routine
With this calibration routine the direction of the scanning mirrors are adjusted to the axes of the
motorized XY scanning stage.
For the
Calibrate Rotation
routine a sample with a pronounced structure in the center of the scan field
has to be used. This should be an non-periodic structure, not a periodic pattern with a high spatial
frequency.
The stage is moved a single step in X direction, an image before and after the step is taken. By correlation
of the 2 images the scan field orientation is matched to the stage coordinate system (XY). The rotation
angle between both systems is displayed.
This function is also available independently from the
StitchArt plus
option.
•
Load the macro from AIM/Macros/TileScanRotation.lvb
Calibrate Objective Routine
With this calibration routine the objective error of first order (spherical component) is determined and
corrected. This routine has to be performed when accurately measuring radii.
For the
Calibrate Objective
routine a sample with a pronounced structure in the center of the scan field
has to be used. We recommend the mirror sample provided with your system or a flatness standard. Try
to bring the surface of the flatness sample in focus.
•
Press the
Calibrate
button.
−
An image stack of 50 slices in 100 nm steps is acquired (centered around current position). After
the topography reconstruction a 3D sphere fit is applied. The correction factor 1/R is displayed in
1/mm. This calibration is only valid for the current objective position. With a change of the objective
position this calibration has to be applied for the new objective, first.
This function is also available independently from the
StitchArt plus
option.
•
Load the macro from AIM/Macros/SphericObjectiveCorrection.lvb
Fig. 4-190
Profile & Stack Stitching window