LSM 510
OPERATION IN EXPERT MODE
LSM 510 META
Display and Analysis of Images
Carl Zeiss
03/06
B 45-0021 e
4-321
Calculation of roughness parameters
The following roughness parameters are calculated (e.g. for a Y-section)
−
Mean height of all profile height values
R
c
( )
∑
=
⋅
⋅
=
−
y
N
j
j
y
c
y
x
z
N
R
1
,
1
N
x
, N
y
... number of pixels in X- or Y-direction
Arithmetic mean deviation of all profile height values
R
a
( )
[
]
∑
=
−
⋅
⋅
=
−
y
N
j
c
j
y
a
R
y
x
z
N
R
1
,
1
−
Quadratic mean deviation of all profile height values
R
q
( )
[
]
∑
=
−
⋅
⋅
=
−
y
N
j
c
j
y
q
R
y
x
z
N
R
1
2
,
1
−
Skewness of the distribution of all profile height values
R
SK
)
,
(
1
1
3
3
j
N
j
q
y
SK
y
x
z
R
N
R
y
∑
=
⋅
⋅
⋅
=
−
Kurtosis of the distribution of all profile height values
R
KU
)
,
(
1
1
4
4
j
N
j
q
y
KU
y
x
z
R
N
R
y
∑
=
⋅
⋅
⋅
=
−
Maximum peak height
R
P
c
P
R
z
R
−
=
max
−
Maximum valley depth
R
V
min
z
R
R
c
V
−
=
−
Maximum roughness depth
R
t
(= Peak to Valley / PV)
min
max
z
z
S
t
−
=
−
maximum height difference of the overall topography along a profile.
