LSM 710 and LSM 780
CENTER SCREEN AREA / IMAGE CONTAINERS - …
Systems Topography
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Carl
Zeiss
02/2010 M60-1-0025
e
217
−
Kurtosis of the distribution of all profile height values
R
KU
)
,
(
1
1
4
4
j
N
j
q
y
KU
y
x
z
R
N
R
y
∑
=
⋅
⋅
⋅
=
−
Maximum peak height
R
P
c
P
R
z
R
−
=
max
−
Maximum valley depth
R
V
min
z
R
R
c
V
−
=
−
Maximum roughness depth
R
t
(= Peak to Valley / PV)
min
max
z
z
S
t
−
=
−
maximum height difference of the overall topography along a profile.
−
Classification of topography in 5 equal area elements (rectangles in the 2D mode)
−
average roughness depth
R
z
:
−
=
−
+
−
+
−
+
−
+
−
R
z
z
z
z
z
z
z
z
z
z
z
max
min
max
min
max
min
max
min
max
min
1
1
2
2
3
3
4
4
5
5
5
Averaging of R
t
-values of all the 5 single area elements. When combined, both parameters provide
information about the homogeneity of the surface. Big differences are indicative of pronounced
inclination of the overall area or of spikes.
Developed Surface Area Ratio:
Σ
(surface area
ij
) /
Σ
(projected area
ij
)
The percentage of the 3D surface area (sum off all triangles formed by adjacent data points) to
the 2D surface area produced by projecting the 3D surface onto the threshold plane.
−
maximum roughness depth
R
max
:
−
=
−
−
−
−
−
R
Max z
z
z
z
z
z
z
z
z
z
max
max
min
max
min
max
min
max
min
max
min
(
,
,
,
,
)
1
1
2
2
3
3
4
4
5
5
maximum of R
t
-values of all the 25 single area elements.
Both the roughness parameters and the Z-histogram can be changed by using filters!
