CENTER SCREEN AREA / IMAGE CONTAINERS - …
LSM 710 and LSM 780
Carl Zeiss
Topography View
Systems
218 M60-1-0025
e
02/2010
(3)
3D Amplitude parameters (Topography Roughness):
Mean height z
RSc
PSc
WSc
Dispersion
Arithmetic mean deviation
RSa
PSa
WSa
Root mean square deviation
RSq
PSq
WSq
Asymmetry Skewness
RSsk
PSsk
WSsk
Sharpness Kurtosis
RSku
PSku
WSku
Extremes Highest
peak
RSp
PSp
WSp
Lowest
valley
RSv
PSv
WSv
Absolute peak to valley
RSt
PSt
WSt
Averaged peak to valley
RSz
PSz
WSz
Maximum peak to valley
RSmax
PSmax
WSmax
If chosen filters are:
FFT High
No, M
FFT L
(4)
Calculation of roughness parameters:
The following roughness parameters are calculated:
−
Mean height of all surface height values
S
c
(
)
∑
∑
=
=
⋅
⋅
⋅
⋅
=
−
y
x
N
j
j
i
N
i
y
x
c
y
x
z
N
N
RS
1
1
1
,
N
x
, N
y
... number of pixels in X- or Y-direction
−
Arithmetic mean deviation of all surface height values R
S
a
(
)
[
]
∑
∑
=
=
−
⋅
⋅
⋅
⋅
=
−
y
x
N
j
c
j
i
N
i
y
x
a
RS
y
x
z
N
N
RS
1
1
1
,
−
Quadratic mean deviation of all surface height values R
S
q
(
)
[
]
∑
∑
=
=
−
⋅
⋅
⋅
⋅
=
−
y
x
N
j
c
j
i
N
i
y
x
q
RS
y
x
z
N
N
RS
1
2
1
1
,
−
Skewness of the distribution of all surface height values R
S
SK
(
)
∑
∑
=
=
⋅
⋅
⋅
⋅
⋅
=
y
x
N
j
j
i
N
i
q
y
x
SK
y
x
z
RS
N
N
RS
1
3
1
3
1
,
−
Kurtosis of the distribution of all surface height values
S
KU
(
)
∑
∑
=
=
⋅
⋅
⋅
⋅
⋅
=
y
x
N
j
j
i
N
i
q
y
x
KU
y
x
z
RS
N
N
RS
1
4
1
4
1
,