LSM 710 and LSM 780
CENTER SCREEN AREA / IMAGE CONTAINERS - …
Systems Topography
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Carl
Zeiss
02/2010 M60-1-0025
e
219
−
Maximum peak height RS
P
c
P
RS
z
RS
−
=
max
−
Maximum valley depth
S
V
min
z
RS
RS
c
V
−
=
−
Maximum roughness depth R
S
t
(= Peak to Valley / PV)
min
max
z
z
RS
t
−
=
−
maximum height difference of the overall topography.
Classification of topography in 25 equal area elements (rectangles in the 2D mode)
−
average roughness depth
S
z
:
25
25
25
2
2
1
1
min
max
min
max
min
max
z
z
z
z
z
z
RS
z
−
+
⋅
⋅
⋅
+
−
+
−
=
−
Averaging of R
t
-values of all the 25 single area elements. When combined, both parameters provide
information about the homogeneity of the surface. Big differences are indicative of pronounced
inclination of the overall area or of spikes.
−
maximum roughness depth R
S
max
:
)
,
,
,
(
min
max
min
max
min
max
max
25
25
2
2
1
1
z
z
z
z
z
z
Max
RS
−
⋅
⋅
⋅
−
−
=
−
maximum of R
t
-values of all the 25 single area elements.
Both the roughness parameters and the Z-histogram will be influenced by the use of filters!