entegris Optimizer ST2, Installation And Use Manual

Page 1: ...MICROCONTAMINATION CONTROL MANUAL Optimizer ST2 Filter Manifold Installation and use manual ...

Page 2: ...w Type Manifold Part Number AMVZL22KT 8 Part Number AMVZL32KT 9 Part Number AMVZL42KT 10 Safety Instructions 11 Preparation for Installing the Optimizer ST2 Manifold 11 Installing the Optimizer ST2 Manifold 12 Attaching and Removing the Filter 16 Preparing the Line Before Replacing the Filter 16 Preparing the Filter to be Replaced 16 Removing the Filter or Flushing Shell 16 Attaching the Filter or...

Page 3: ...s PFA O rings on manifold OM Kalrez Connections Tube Flowell 60 Flowell 80EZ See part number table for sizes Maximum operating conditions Maximum operating pressure 0 39 MPa 3 9 bar 57psi at 25 C 77 F Maximum operating temperature 40 C 104 F ORDERING INFORMATION OPTIMIZER ST2 MANIFOLD Quantity 1 each box Tube Type standard size Part number Inlet outlet Vent port AMVT442K1 12 7 mm 1 2 tube 6 35 mm ...

Page 4: ...OPTIMIZER ST2 FILTER MANIFOLD 3 Entegris Inc Installation and Use Manual MANIFOLD AND FILTER PARTS Manifold Outlet Inlet Vent Release tab Lever Filter guide Filter Tab ...

Page 5: ...m 0 24 42 5 mm 1 67 50 8 mm 2 0 65 0 mm 2 56 19 0 mm 0 75 4X Ø4 5 mm 0 18 R 3 0 mm 0 12 23 0 mm 0 91 6 5 mm 0 26 9 2 mm 0 36 22 2 mm 0 87 2 0 mm 0 08 Top View Front View Side View 104 5 mm 4 11 40 8 mm 1 60 62 0 mm 2 44 139 1 mm 5 48 25 3 mm 1 00 25 3 mm 1 00 95 5 mm 3 76 150 0 mm 5 91 32 4 mm 1 27 16 0 mm 0 63 102 8 mm 4 05 205 0 mm 8 07 174 0 mm 6 85 126 0 mm 4 96 ...

Page 6: ...INUED FLOWELL 60 ELBOW TYPE MANIFOLD PART NUMBER AMVXL22KT Top View Front View Side View 104 5 mm 4 11 40 8 mm 1 60 62 0 mm 2 44 139 1 mm 5 48 25 3 mm 1 00 25 3 mm 1 00 95 5 mm 3 76 60 0 mm 2 mm 2 36 0 08 32 4 mm 1 27 16 0 mm 0 63 102 8 mm 4 05 205 0 mm 8 07 174 0 mm 6 85 Outlet Inlet Vent ...

Page 7: ...TYPE MANIFOLD PART NUMBER AMVXL32KT Top View Front View Side View 104 5 mm 4 11 40 8 mm 1 60 62 0 mm 2 44 139 1 mm 5 48 25 3 mm 1 00 25 3 mm 1 00 95 5 mm 3 76 60 0 mm 2 mm 2 36 0 08 32 4 mm 1 27 16 0 mm 0 63 102 8 mm 4 05 205 0 mm 8 07 174 0 mm 6 85 98 0 mm 2 mm 3 86 0 08 78 0 mm 2 mm 3 07 0 08 Outlet Inlet Vent ...

Page 8: ...OLD PART NUMBER AMVXL42KT 104 5 mm 4 11 40 8 mm 1 60 62 0 mm 2 44 139 1 mm 5 48 25 3 mm 1 00 25 3 mm 1 00 95 5 mm 3 76 60 0 mm 2 mm 2 36 0 08 32 4 mm 1 27 16 0 mm 0 63 102 8 mm 4 05 205 0 mm 8 07 174 0 mm 6 85 98 0 mm 2 mm 3 86 0 08 78 0 mm 2 mm 3 07 0 08 Outlet Inlet Vent Side View Front View Front View Top View Top View ...

Page 9: ... Entegris Inc DIMENSIONS CONTINUED FLOWELL 80EZ ELBOW TYPE MANIFOLD PART NUMBER AMVZL22KT 104 5 mm 4 11 40 8 mm 1 60 62 0 mm 2 44 139 1 mm 5 48 25 3 mm 1 00 25 3 mm 1 00 95 5 mm 3 76 85 0 mm 2 mm 3 45 0 08 Front View 42 5 mm 1 67 73 0 mm 2 87 Top View Side View ...

Page 10: ...NSIONS CONTINUED FLOWELL 80EZ ELBOW TYPE MANIFOLD PART NUMBER AMVZL32KT 104 5 mm 4 11 40 8 mm 1 60 62 0 mm 2 44 139 1 mm 5 48 25 3 mm 1 00 25 3 mm 1 00 95 5 mm 3 76 79 0 mm 2 mm 3 11 0 08 Front View 73 0 mm 2 87 42 5 mm 1 67 89 0 mm 3 50 Top View Side View 98 0 mm 2 mm 3 86 0 08 ...

Page 11: ...ED FLOWELL 80EZ ELBOW TYPE MANIFOLD PART NUMBER AMVZL42KT 104 5 mm 4 11 40 8 mm 1 60 62 0 mm 2 44 139 1 mm 5 48 25 3 mm 1 00 25 3 mm 1 00 95 5 mm 3 76 Inlet Outlet Front View 116 5 mm 2 mm 4 59 0 08 136 5 mm 2 mm 5 37 0 08 Top View Side View 116 0 mm 4 57 96 0 mm 3 78 73 0 mm 2 87 42 5 mm 1 67 ...

Page 12: ...t be returned in some cases 1 Determine the manifold mounting position and prepare the required mounting holes or conversion bracket CAUTION Refer to the dimensions on pages 4 to 10 and secure the space required for replacing and installing the fitting 2 Place the manifold on a vertical surface of sufficient strength so that the top of the mani fold is horizontal Use a level if necessary to ensure...

Page 13: ...NG THE OPTIMIZER ST2 MANIFOLD 1 Raise the lever 2 Press the spring shaft with a thin object The shaft will come off if you press both sides CAUTION Do not press anywhere other than the designated spring shaft The shaft may come off and an unexpected accident such as leakage may occur ...

Page 14: ...o allow access to the tool mounting bracket 4 Screw the manifold to the tool referring to the hole location on the mounting plate dimensional drawing found on page 4 5 Return the lower part of the open manifold and push the shaft protrusions from both left and right sides to fit it on the upper part of the manifold ...

Page 15: ...perly engaged in the holes If used without confirmation the manifold may not work properly and may cause an unexpected accident such as leakage CAUTION Make sure ALL spring shafts are properly engaged If the tip of the spring shaft is embedded and or the collar is visible white part that surrounds spring shaft the spring shaft is not properly placed Good Bad Bad Good Bad ...

Page 16: ...ver is tilted the spring shaft may not be placed properly CAUTION Do NOT apply over 10 N m of tubing tension to the manifold connectors Improper tubing tension may cause an unexpected accident such as chemical leakage Acceptable tubing tension Improper tubing tension risk of leakage 5 N m 10 N m In Out 3 8 Vent 1 4 In Out 1 2 Vent 1 4 Good Bad ...

Page 17: ...uble wrapped for use in cleanrooms Please handle the product according to the cleanroom procedure REMOVING THE FILTER OR FLUSHING SHELL 1 Raise the lever completely while lowering the release tab with your thumb CAUTION If the lever is not raised enough the filter may not pull out smoothly Lift the lever completely until it stops not doing so may cause damage to the manifold or filter CAUTION When...

Page 18: ...OPTIMIZER ST2 FILTER MANIFOLD 17 Entegris Inc Installation and Use Manual 2 Grasp the filter or flushing shell tab and slowly pull out the used filter or flushing shell from the filter guide ...

Page 19: ...resistance push the filter or flushing shell to the end CAUTION If the lever is not raised enough the filter or flushing shell cannot be inserted along the filter guide Remove the filter or flushing shell lift the lever to the top and install again If the filter or flushing shell is forcibly inserted while the lever is not completely raised the manifold or filter may be damaged or chemical may lea...

Page 20: ...nserted to the end Slowly push the lever down from position 2 to position 5 in three steps 2 3 4 5 This procedure ensures the manifold connectors are inserted properly and prevents O ring tilt and distortion 4 Ensure no red mark is visible from the back of the release tab shown with blue arrows this confirms the level is locked Incomplete insertion of filter flushing shell The manifold connection ...

Page 21: ...tting your fingers caught in moving parts resulting in injury 6 Lower the lever until you hear a click from the release tab CAUTION Make sure all the spring shafts are properly engaged See page 14 for detailed check points Make sure all the fittings and tubing are securely fastened before starting liquid flow FILTER STARTUP 1 Connect a suitable filter using the installation procedure described in ...

Page 22: ...finger CAUTION Wipe away any chemical following safety guidelines before replacing the O rings b Pull your thumb and forefinger nearside and push the O ring out Grasp the protruding part of the O ring with your other hand and push it down from above to remove it from the groove CAUTION Do not use any sharp tool such as scissors tweezers or knife to remove O rings as it may damage the connectors or...

Page 23: ...an do for you Visit entegris com and select the Contact Us link to find the customer service center nearest you TERMS AND CONDITIONS OF SALE All purchases are subject to Entegris Terms and Conditions of Sale To view and print this information visit entegris com and select the Terms Conditions link in the footer www entegris com Entegris the Entegris Rings Design and other product names are tradema...