Hamamatsu ENERGETIQ LDLS EQ-77X, Operation Manual

Page 1: ...Model EQ 77X Laser Driven Light Source LDLS Operation Manual Revision 4 September 2023 DOC 10697...

Page 2: ...getiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to change without notice Energetiq laser driven light source LDLS p...

Page 3: ...l of the Unit 11 Chapter 3 Preparation of System 12 3 1 Unpacking Guide 12 3 2 System Description 12 3 3 Physical Specifications 15 3 4 Utility Requirements 15 3 5 Environmental Requirements 15 3 6 Re...

Page 4: ...ssories 24 Chapter 9 Warranty 25 Chapter 10 Drawings Schematics and Pin Assignments 26 10 1 Dimensional Drawings 26 10 1 1 Controller Dimensional Drawings 26 10 1 2 Lamp Head Dimensional Drawings 26 1...

Page 5: ...amp head unit and interconnecting cable Connection to AC power is required for operation Connection to cooling fluid is required Connection to nitrogen purge gas is strongly recommended for best perfo...

Page 6: ...ments can occur if the lamp is mishandled Do not open the enclosure of either the lamp head or the power supply controller Dangerous invisible infrared laser beams and hazardous voltages exist inside...

Page 7: ...owing two conditions 1 This device may not cause harmful interference and 2 this device must accept any interference received including interference that may cause undesired operation Note This equipm...

Page 8: ...in the UV as well as the visible bands A class 4 laser is located in the lamp head enclosure The optical configuration of the lamp head ensures that the direct laser beam cannot exit the unit The EQ...

Page 9: ...The light intensity must not be zero Criteria C Light intensity It shall be restored to normal by the operator after the test 2 5 Labels and Safety Notification The following safety labels appear on t...

Page 10: ...resent 4 Explanatory label states the classification of the laser product Class 1 is the lowest hazard level classification 5 Certification label states that the equipment has been tested and verified...

Page 11: ...cuit The contact or switch should be rated for 80mA minimum at 5VDC The interlock circuit must be connected to enable the operation of the unit Should the interlock connection open during operation or...

Page 12: ...em Description The EQ 77X system consists of a power supply controller lamp head controller to lamp head interconnect cable not shown and power input cable not shown I O interface connections also not...

Page 13: ...nt for electrical details and commands Located on the EQ 77X controller front panel are LED system status indicators The function of these indicators is described below in the table Status Indicator L...

Page 14: ...et These fittings are for connection of cooling fluid required by the lamp 4 Cooling Fluid Outlet 5 Control Connector 21 pin mixed D sub Provides various power and control signals to from the power su...

Page 15: ...ed Clean dry nitrogen grade 4 8 or higher filtered to 5um 20 psig 0 14 MPa supply pressure Fittings 4mm push to connect Cooling Fluid Required 0 5 liter minute 18 25 C 100 psig 0 69 MPa max inlet pres...

Page 16: ...interlock circuit The contact or switch should be rated for 8mA minimum at 5VDC The interlock circuit must be connected to enable the operation of the unit Should the interlock connection open during...

Page 17: ...oxygen and attenuate the light output in the 220 280 nm band as well as below 200 nm in the presence ofatmospheric oxygen and water vapor The purge port fitting is a push to connect type sized for 4m...

Page 18: ...e cable Mating connector is a standard high density 15 pin d sub male for example Amp part no 748364 1 with contacts 1658670 2 Optionally connect a model EQ 99 RC remote control module to the I O conn...

Page 19: ...lamp head module to the user s equipment Read 4 2 Installation Procedure first before making any connections 4 2 Installation Procedure The lamp head should be mounted with the output window on the s...

Page 20: ...Chiller Information The system must be connected to a cooling system See Chapter 8 Accessories for the recommended chiller 3 Connect the black 21 pin mixed D sub interconnect cable from the power supp...

Page 21: ...y if long off periods are not required 1 With the EQ 99 RC remote control module connected properly review the status LEDs on the power supply controller The POWER ON LED should be lit and neither the...

Page 22: ...encountered during operation please contact Energetiq for assistance If there is a component failure do not attempt to open the controller or lamp enclosure of the EQ 77X Any service to the system mu...

Page 23: ...of the source by verifying the interlocks Confirm that the external interlock contact is closed or that the black jumper plug is fully inserted into the back of the EQ 99 RC remote control To reset or...

Page 24: ...convenience Energetiq offers a suitable chiller produced by Solid State Cooling Inc You may also choose to procure a chiller directly through your local Solid State Cooling Inc representative SSC Mode...

Page 25: ...Chapter 9 Warranty EQ 77X LDLS Operation Manual 25 of 31 Chapter 9 Warranty For information on your EQ 77X system s warranty contact your local distribution representative...

Page 26: ...Q 77X LDLS Operation Manual 26 of 31 Chapter 10 Drawings Schematics and Pin Assignments 10 1 Dimensional Drawings 10 1 1 Controller Dimensional Drawings 10 1 2 Lamp Head Dimensional Drawings EQ 77X Co...

Page 27: ...LE FAULT 3 Pulled to digital common when OK float on FAULT CONTROLLER FAULT 4 Pulled to digital common when OK float on FAULT ISOLATED 5V SUPPLY 5 200mA maximum referenced to digital common DIGITAL CO...

Page 28: ...Chapter 10 Drawings Schematics and Pin Assignments EQ 77X LDLS Operation Manual 28 of 31 10 4 Remote Interface Schematic EQ 77X Remote Interface Schematic Figure 9...

Page 29: ...SCII characters format depending on the command issued The following table describes the serial commands and their functions Command Character Function Reply from EQ 77X U Increases the present laser...

Page 30: ...eply from EQ 77X Displays a help menu listing the available commands U D Raise lower laser power by 0 5 Q Query present laser power F Reset laser power to Factory default B Burn present settings to no...

Page 31: ...023 2 Eric Burz Updated the chapter Safety and Compliance Added section on EMC compliance standards Changed nitrogen purge gas from required to recommended Minor edits 06 23 2023 3 Eric Burz Complianc...