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Hitachi S-4100, Manual

The Hitachi S-4100 manual is available for free download on 88.208.23.73:8080, offering users a comprehensive guide to maximize the product's potential. This manual provides detailed instructions, troubleshooting tips, and step-by-step setup procedures, ensuring a seamless user experience. Discover the full potential of the Hitachi S-4100 with this informative manual.

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Hitachi S-4100 FieldD Emission Scanning Electron Microscope

General Information:

Hitachi field emission scanning electron microscope converted to electron

beam writing by using nanometer pattern generating system (NPGS)

Equipment Specifications:

-‐

Resolution: 15

€

o

A

at 30 KV

-‐

Magnification: 20 to 300,000x

-‐

Electron gun: Cold-‐cathode field emission electron gun

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Summary of Contents for S-4100

Page 1: ...ation Hitachi field emission scanning electron microscope converted to electron beam writing by using nanometer pattern generating system NPGS Equipment Specifications Resolution 15 o A at 30 KV Magnification 20 to 300 000x Electron gun Cold cathode field emission electron gun ...

Page 2: ...ves stay free of any kind of contamination to keep the inside system clean Samples Specimens must be completely dried Use carbon conductive tabs to mount sample on sample holder Adjust the height of sample holder with LEVEL GAUGE level gauge is on top of S E C chamber Loading Sample SC Air Lock Valve Closed Make sure High Voltage is OFF on display unit Set SC SEC switch to SEC MV 1 Valve is Closed...

Page 3: ...sh FLASH STANDBY Push ON ON ADJ and keep eye on IP1 Emission current when IP1 pressure goes up degasses the tip Must Wait for Two Minute then TURN ON HI VOLTAGE Note The Emission Current should be 10µA if not push ON ON ADJ 3 Do ABC to adjust brightness and contrast 4 Go to TV Rate on SCAN SPEED section F or S 5 Need to Do Beam Alignment Go to COLUMN ADJUSTMENT or PF3 Key Board Chose Beam Align Us...

Page 4: ... minimize movement on display Exit Go to COLUMN ADJUSTMENT or PF3 again Choose Stig Align Y Adjust with Y Stigmatism to minimize movement on display Exit 8 Focusing the Image use FOCUS KNOBS STIGMAN ALIGNMENT knobs Use COARSE focus then FINE focus Notice if image is stretching while you turn focus knobs in out of focus If so need to stigmate using the STIGMA ALIGNMENT knobs 9 Now Ready to operate ...

Page 5: ...ight Insert the film Arrows pointing in Facing down on side with writing this side facing lens Pull film cover out polaroid remains inside Take the picture by pushing Direct button Push the film cover back in Turn lever to position P left Pull hard to remove film Wait 30 seconds to allow to develop Push button A on Run Stop section Shut Down Operation Bring magnification to 40 T urn Off HV READY C...

Page 6: ... holder from Transfer Rod then close the door hold closed Push EVAC to Rough the SEC wait till green light for SEC VACUUM HI lights up Check the pressure for IP1 5x10 7 IP2 1 5x10 7 IP3 6x10 6 Turn off Display power ...

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