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BASIC Step-by-Step Instructions for JEOL 6060LV  

Version 4/13/11

 

General Operation

 

 
1.

 

Check System: Pumps running and EVAC light green (main panel near key switch)? 
If not notify a staff member. 

2.

 

If the SEM software is not running, start SEM Software (

SEM Main Menu

 icon).  It 

takes several minutes to start, be patient.  If you need to log into computer use the 
account (USER:jeol;PASSWORD:jeol). Please do not log into other accounts. Use 
portable media, ftp, or UIUC NetFiles to transfer your data. 

3.

 

Prepare your samples before venting! Please keep the area clean, organized, and wear 
GLOVES!! Anything that goes in the vacuum should be clean and handled only with 
gloves or tweezers; keep the vacuum clean. 

4.

 

Press the 

Sample

 

button on toolbar.  

5.

 

Press the 

Vent

 button; it takes a couple minutes to vent. 

 

6.

 

When Vent light stops blinking (main panel near key switch), slide open stage 
drawer. 

 

Summary of Contents for 6060LV

Page 1: ...computer use the account USER jeol PASSWORD jeol Please do not log into other accounts Use portable media ftp or UIUC NetFiles to transfer your data 3 Prepare your samples before venting Please keep...

Page 2: ...the height gauge for desired working distance No part of the sample should extend above the ruler end A 10 mm W D should be used for nearly all work except low magnification imaging or if you need to...

Page 3: ...contact these when observing your sample 10 Turn on the IR chamber scope if off using the switch button on the control box and a switch on CRT monitor and adjust illumination as needed Always use cham...

Page 4: ...filament heating or Auto Gun Control We found the use of these seem to shorten filament life significantly a Select an area on the sample or sample holder that has reasonably homogeneous brightness a...

Page 5: ...ases after going through a maximum before beginning of orange indicator the gun tilt shifts are misaligned This is usually because the filament was significantly under saturated when you started Resta...

Page 6: ...cus 21 Click ACB auto contrast brightness 22 Focus and check the objective aperture centering especially for high magnification work 23 Fine focus and correct the astigmatism the image manually or cli...

Page 7: ...rging artifacts h Many commonly used functions are available on the knob panel magnification brightness contrast stigmator x and y image fine shift x and y scanning mode and auto functions focus stigm...

Page 8: ...chassis stops blinking slide open stage drawer 6 If changing samples go to step 7 of general operation 7 Change vacuum mode to HV if in LV mode 8 Carefully slide the stage drawer closed Press EVAC bu...

Page 9: ...other translation control Iterate to fine tune Correct any severe astigmatism see below to be able to better fine tune 5 Deselect Wobb Manually Correcting the Astigmatism Note You need an image with...

Page 10: ...10 30 kV is the condition the instrument provides it s best resolution 100 kX possible This is a fairly noisy image even on a Au C sample You must choose the spot size according to your sample and wh...

Page 11: ...focus astigmatism correction a little more difficult to do ACB and manual knob adjustment function in all the BEIW modes Selecting the Operating Voltage 1 Click Acc Volt to get 2 Double Click value t...

Page 12: ...samples but this requires addition procedures wet In general use as low as pressure as possible that works for imaging the sample 1 to 10 s of Pa Again BEIW Shadow mode provides secondary electron lik...

Page 13: ...computer is responding use the software restart START Menu If the computer is locked press and hold the power button on the front of the computer until it turns off Release the button then press it a...

Page 14: ...d Manual control buttons Manual adjusting buttons spotsize contrast brightness etc and image size switching button are arranged Image display area A SEM image of 640 480 pixels can be displayed and th...

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