Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
PZ82E
P-5x7/P-5x8 Positioners
User Manual
Version: 3.2.0
Date: 23.06.2022
This document describes the following products:
P-517, P-527
Precision XY nanopositioner
P-517.2CD/.2CL, 100 µm × 100 µm
P-527.2CD/.2CL, 200 µm × 200 µm
P-517, P-527
Precision XYZ nanopositioner
P-517.3CD/.3CL, 100 µm × 100 µm × 20 µm
P-527.3CD/.3CL, 200 µm × 200 µm × 20 µm
P-517, P-527
Precision XY / rotation nanopositioner
P-517.RCD, 100 µm × 100 µm, 2 mrad
P-527.RCD, 200 µm × 200 µm, 4 mrad
P-558, P-518, P-528
Precision nanopositioning Z stage
P-558.ZCD/.ZCL, 50 µm
P-518.ZCD/.ZCL, 100 µm
P-528.ZCD/.ZCL, 200 µm
P-558, P-518, P-528
Precision nanopositioning Z and tip/tilt stage
P-558.TCD, 50 µm, 0.5 mrad
P-518.TCD, 100 µm, 1 mrad
P-528.TCD, 200 µm, 2 mrad
.2CD/.3CD/.ZCD/.RCD/.TCD with D-sub
connector
.2CL/.3CL/.ZCL with LEMO connectors
