rbd instruments IG2, Manual

Page 1: ...IG2 Manual For Use With the 32 175 Control RBD Instruments Inc 2437 NE Twin Knolls Dr Suite 2 Bend OR 97701 541 330 0723 WWW RBDINSTRUMENTS COM...

Page 2: ...nstall the 04 165 Ion Source Control 10 Remote Switching the Ion Beam 10 Opera ng the IG2 With the 32 175 Controller 11 32 175 Front Panel Controls and Meter 11 Ini al Out gassing of the 04 165 Ion So...

Page 3: ...technical informa on and instruc ons provided in the included documenta on It is also expected that unless Operators have the skills and knowledge required by maintenance personnel Operators will not...

Page 4: ...either express or implied including but not limited to implied warran es of merchantability and tness for a par cular purpose This limited warranty gives customer speci c legal rights Customer may hav...

Page 5: ...uded from the Limited Warranty for the speci c product of which they are a part However each of these expendable items will have its own warranty and will be replaced or repaired in accordance with it...

Page 6: ...ioniza on chamber and are then focused at the target with energies of up to 2K eV The impurity content of the ion beam is minimized by using an o axis lament geometry A focusing lens permits high ion...

Page 7: ...The diagram below iden es the dimensions of the RBD 04 165 as well as its sec ons Please note that the ver cal dimensions re ect the 04 165 dimensions when the op onal X Y aligner RBD part number IG2...

Page 8: ...ng conditions 32 175 Specifications Specification Description Input Power 120 or 230 VAC 47 63 Hz Single Phase Output Voltage 5 kV to 2 kV in 500 volt increments Ripple to Noise 30 mV peak to peak Foc...

Page 9: ...for damage If there is any damage please report it to the shipping company immediately 3 Verify that you have the following items If any are missing please contact RBD Instruments at 541 330 0723 or...

Page 10: ...f the pins on the 04 165 ion source b The lament pins A to B and B to C should show less than 1 ohm of resistance c All other pins should be open to each other d All pins should be open to ground the...

Page 11: ...lowing switches and controls on the 32 175 Control front panel a Set the Beam Control switch to O b Set the Beam Voltage Select dial to 500 which is its lowest se ng c Turn the Focus Adjust dial arrow...

Page 12: ...reduced by 50 NOTE Before outgassing the 04 165 ion source the vacuum chamber needs to be baked out to remove water vapor from the ion source If at any time during out gassing the emission meter start...

Page 13: ...e then slowly increase the emission current knob un l there is 25 mA of emission current 5 Back ll the chamber with Argon to 5 to 6 X 10 5 Torr 6 Set the beam voltage knob to the desired accelera on v...

Page 14: ...nches Note that the IG2 EAPR requires a large ID tube approximately 1 5 to work properly The IG2 EAPR ange which is tapped for six 28 moun ng bolts is mounted to the vacuum cham ber at the appropriate...

Page 15: ...rr with an inert gas such as argon Positive ions are created by electron impact within the ion gun s ionization chamber The ions are then extracted from the ionization chamber accelerated through a fo...

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