ULTRA TEC 3250.1, User Manual

Page 1: ...pping and Polishing Machine User Manual 3255 1 Issue 2 3 Updated June 2017 1025 E Chestnut Ave Santa Ana CA 92701 Toll Free US 1 877 542 0609 Tel 1 714 542 0608 Fax 1 714 542 0627 e mail info ultratecusa com www ultratecusa com ...

Page 2: ... Note System shown above is complete with the Ultracollimator system ...

Page 3: ...t Number has been tested and certified to meet the guidelines of 21 CFR 1040 10 and 1040 11 for CDRH Compliance The Ultrapol Advance is a Class IIIa laser autocollimator assisted device that incorporates a number of CDRH mandated safety features including but not limited to an emission indicator and chassis interlocks to bring the manufacturer into compliance with U S government regulations ...

Page 4: ...gnment Ultracollimator 19 IV PREPARATION FOR FLAT POLISHING 19 A Mounting a Bare Die Sample 19 B Aligning Sample for Parallel Polishing with the Ultracollimator 20 C Load Control 21 D Correcting for Observed Tilt during polishing 22 V APPLICATIONS 23 A Topside Delayering of Single Die IC s 23 B Backside Preparation 23 C Cross sectioning of Die Packages 25 D Other Lapping Polishing Applications 25 ...

Page 5: ... 1 Set of loading weights 100g 200g 2 500g 3278 1 Squeegee 6170 1 Quick release plate 1mm hole 6170 2 Quick release plate 2mm hole 6377 U Allen wrench set 7 64 w handle 7 64 and 9 64 Optional Features Ultracollimator System 6183 UL Ultracollimator unit 5259 1 Power Cord 6135 1 Metal optical flat 6158 AD Recirculating Pump C Power Supply The Ultrapol Advance has one power supply Input 110 220VAC 10...

Page 6: ...follow Specifically guidelines 21 CFR 1040 10 and 1040 11 detail the standards that all laser products must meet To comply with Federal regulations all laser system manufacturers must ensure that their products contain mandated safety features register their products with CDRH and properly label each device with its respective warning data Laser products are regulated by CDRH based on the level of...

Page 7: ...racollimator unit housing F Suggested Services supplies Strong flat workbench with 1m x 1m available Hot and Cold water available Lint free wipes Acetone Isopropyl alcohol Double sided tape D I Water Q tips cotton buds G Optional Services supplies Ultrasonic Cleaner with heater INFRATEC Infrared microscope UV Lamp if using curable epoxies for wafer reinforcement DANGER Laser radiation when open AV...

Page 8: ...el with the base plate At this point the base lock lever may be turned to lock the head into position ii Coolant Coolant is an important part of the polishing process The Solenoid Water Actuation system is generally used Feed your water source into the back of the polisher using the supplied nose piece and switch the Coolant Switch to the on position on the front panel Water will begin to pump ont...

Page 9: ...0 220V wall socket Power for the Mast head assembly is achieved by connection of the black wire connector extending from the tool head into the labeled socket on the back of the Base Unit Place the black switch which is right next to the power cord socket on the back of the Base Unit to the ON position Place bracket over basin and tighten screw to fix position Place pump directly over the bracket ...

Page 10: ...he Ultracollimator box and L bracket or in one piece L bracket already secured to the Ultracollimator box 1 Attach L bracket onto the back of the ULTRAPOL advance mast using the 4 screws provided for each side 2 Plug the power of the Ultracollimator box ONLY to the back of the Base labeled 110V ...

Page 11: ...ho use the Ultrapol Advance or will be in the area where the Ultrapol Advance is in use should be aware of the potential hazards associated with the equipment Observe the following precautions when operating this equipment This device produces visible laser radiation To prevent injury to your eyes never look directly into the laser Intended for use with a work sample in place No maintenance is req...

Page 12: ...nual a h k j i g f b c d e Baser Unit a Main Power switch b Sample rotation On Off switch and speed knob c Sample oscillation On Off switch and speed knob d Timer Timer Manual Appendix A e Tachometer Lap RPM f Coolant water switch g Lap speed knob h Pump On Off switch i Lap direction FWD Off REV j Stop process switch k Start reset process time switch ...

Page 13: ... Z direction micro adjust m Locking screw for slippable scale n Slippable scale o Floating head lock p Mast position lock q Load control knob r Analog dial height indicator s Lift lever t Tilt quick release interface u Tilt knobs v Quick release lock u v ...

Page 14: ... Video 1 z LCD Power ON OFF aa Y axis crosshair adjustment bb Beam Brightness cc X axis crosshair adjustment dd Beam ON OFF switch ee Ultracollimator shutter attenuator ff Second X axis crosshair adjustment gg Second Y axis crosshair adjustment hh Video 2 Input w x y z aa bb cc dd ee gg ff hh ...

Page 15: ...de 9 The third button down Video 2 Vision camera mode 10 The crosshairs in Ultracollimator mode can be adjusted using the knobs for either the vertical or horizontal lines If equipped with the Ultracollimator i Adjusting the Amplitude of Oscillation The sweep of the oscillation can be increased or decreased by a set screw in a cam on the left side of the base plate Use the hex screwdriver provided...

Page 16: ...lignment channel on the bottom of the holder means that the plate is mounted at the same rotational position ii SEM Stub Holder See Order Codes Below Hitachi Compatible Holder shown The Quick Release SEM Stub Holder provides time saving for the user who will be inspecting resultant delayered or polished surfaces in the SEM By mounting the sample directly on a compatible stub several steps of remou...

Page 17: ...cal Stub 6175 P Philips Stub only stainless steel 6178 P Philips Stub only aluminum 6172 J JEOL compatible 6400 QR Holder optical Stub 6178 J JEOL Stub only aluminum 6172 F FEI FIB compatible QR Holder optical Stub 6178 F FEI Stub only aluminum Other brand compatible styles can be made on request Single Die X section Stub Holder Mounting Fixture 6178 1 See section above for details of replacement ...

Page 18: ...hat the holder can be used with the Ultracollimator To do so simply place the optical flat in place and mount the sample into the holder Place the holder into the quick release and observe the dot on the LCD screen Note The reference dot on the screen is just that a reference point from which to begin adjustment of the tilt The sample that has been potted may not be parallel to the holder Adjust t...

Page 19: ...Place the work holder with micrometer attached on the quick release 4 Turn pump coolant oscillation and lap switches to the OFF position 5 Be sure that the oscillation sweep is closed off all the way so there is no sweep turning the set screw CW X plane alignment 3 o clock and 9 o clock positions 6 Turn the rotation switch to ON and dial speed to 1 Press START Stop the Rotation at the 3 o clock po...

Page 20: ... to 100 11 Repeat steps 8 10 until both positions have no height difference Y plane alignment 12 o clock and 6 o clock positions 12 Turn the rotation switch to ON and dial speed to 1 Press START Stop the Rotation at the 12 o clock position 13 Turn the Z micro adjust dial on top of the head to bring the head down so that the deflection on the Micrometer reads 100 14 Rotate the head to the 6 o clock...

Page 21: ...ance Preferably one that does not have any film attached to it 2 Turn pump coolant oscillation and lap switches to the OFF position 3 Mount the sample holder into the quick release and lock into position 4 Place a piece of double sided stick tape to the back of the micrometer 5 Then place the micrometer right under the quick release interface so that the indicator ball pin of the micrometer is tou...

Page 22: ...lt knob to bring the micrometer needle to 100 9 Rotate back to the pivot point If the readout on the micrometer is not at 100 turn the Z micro adjust dial on top of the head to bring the head down so that the deflection on the Micrometer reads 100 10 Continue steps 7 9 adjusting the corresponding tilt knobs until there is no difference in height between the three positions Note IF ULTRACOLLIMATOR ...

Page 23: ...adjust the location of the DOT to the center 11 Once DOT is in the center tighten the screws on the back of the monitor 12 Place CALIBRATING crosshairs adjusted on the back with a flat head screwdriver directly over the DOT Note Do not move the CALIBRATING crosshairs from this point forward otherwise the machine will be removed from calibration 13 Remove the sample and work holder from the quick r...

Page 24: ...us obscuring the line of sight of the ULTRACOLLIMATOR B Aligning Sample for Parallel Polishing with the Ultracollimator 1 Once the system is calibrated and your sample mounted mount the sample holder into the quick release and lock into position 2 Lower the head by pulling the lock pin out Do not allow the micro positioning head to drop guide the head down slowly 3 Turn the rotating shaft that hol...

Page 25: ...o longer on the bottom stop 6 Now slightly turn pressure control knob CW so that the center shaft returns to the bottom most position 7 Using your hand lift the center shaft slightly then lower the center shaft down to the bottom most position 8 Repeat step 6 multiple times to ensure that the center shaft consistently falls back to the stop when the dial indicator needle is at 0 9 If the center sh...

Page 26: ...he same side as the knob to DESCEND Turning the tilt knob counterclockwise CCW is vice versa the same side elevates effectively lowering the opposite side Both tilt knobs work with this same principle Adjust your sample according to the tilt seen on the die Then proceed with the process The pivot point is a third point not parallel to either tilt knobs which allows you to adjust for side to side a...

Page 27: ...Press START The amount of lap time varies from each sample type to sample type driven by density of device composition and size of the die A good starting point would be a one minute cycle to observe the removal rate ii Tips for Delayering Mounting the die do not cover center hole with any thing this includes wax tape and etc When first starting remember orientation of die on puck this will help y...

Page 28: ...micro adjust ii Lapping For backside you could use various grit size films to remove material The typical steps for material removal are various size diamond films in successive order as follows 30μm 15μm 6μ 3μm and 1μm Use the desired films for removal Once all steps of diamond films have been completed use the polyurethane pad and colloidal silica much like in the delayering process for about 2 ...

Page 29: ...ger devices D Other Lapping Polishing Applications The need to produce surfaces by precision sawing lapping and polishing operations is widespread throughout manufacturing industry and research ULTRA TEC designs manufactures and provides advanced surface preparation equipment and consumables for both routine and custom applications ULTRAPOL advance can be used for a wide range of lapping polishing...

Page 30: ...lush recirculation pump see 6 2 B Flushing the recirculation pump It is necessary to flush out the recirculation pump after use every day or if changing slurries to prevent cross contamination Flushing the pump will also extend the life of the pump 1 Turn pump off 2 Fill a separate basin such as a plastic container with about an inch of water 3 Place pump into the container 4 Turn pump on and allo...

Page 31: ...n to CCW 5 Turn pump coolant ON 6 Point the nozzle towards the center of the lap 7 Press START 8 Turn lap RPM to 100 9 Use a single sided razor blade to scrape surface of lap as shown in the image Hold at 10 Scrape by holding the razorblade directly on top of the lap at approximately a 45 angle to the surface Sweep the blade from inside to outside Pay close attention to the heavily used areas of t...

Page 32: ... 5 5 M 8432 1 1 5 M 8433 1 3 5 M 8434 1 5 5 M 8437 1 6 5 M 8435 1 9 5 M 8436 1 15 5 M 8438 1 30 5 8 PSA Backed Discs Order No Micron Size Quantity M 8203 1 0 5 100 M 8221 1 1 100 M 8202 1 2 100 M 8222 1 3 100 M 8223 1 5 100 M 8224 1 9 100 M 8225 1 12 100 M 8226 1 15 100 M 8227 1 20 100 M 8228 1 30 100 8 Plain Backed Discs Order No Micron Size Quantity M 8403 1 0 5 100 M 8421 1 1 100 M 8402 1 2 100...

Page 33: ...EP or older series ULTRAPOL unit NOTE To qualify customer must purchase ULTRAPOL advance plus ULTRACOLLIMATOR 6170 1 Standard QR Sample Holder for Microscopy preparations optical 6178 1 Mounting Stand for X SECTIONING stub samples 3377 1 Quick Release Vise for cross sectioning packages waveguides etc 6124 1 Encapsulated Mount Work holder variable 1 2 to 1 1 2 diameter mounts Quick Release 3230 1 P...

Page 34: ...8 inch diameter Each 2390 5 Resilient Surface Pad 8 inch Diameter Pack of 3 NOTE The resilient surface pad is used to achieve a PC polish on fiber optic connectors It is placed onto an anodized aluminum plate 6 2239 1 and then covered by the Mylar film to be used Special Note ULTRA TEC is proud to operate a continuous product improvement policy Items may vary in appearance or specification from th...

Page 35: ... 31 APPENDICES ...

Page 36: ...l be illuminated when the time base is Hours Minutes or Minutes Seconds Set Value Settable value used to trigger the timed output Numeric Keys Each of the number keys is used to increment the value of the corresponding digit of the preset or a parameter value I O Status Indicators Illuminates to display when an input or output is active IN for the start input OUT for the timed output and RST for t...

Page 37: ...Minutes Hours Minutes Seconds Factory Setting Hours Minutes Decimal Position Sets the decimal position for the time display Choices are no decimal point 0 1 10ths position 0 0 or hundredths position 0 00 The time range selected in the previous parameter will remain illuminated for reference This parameter will not appear if Minutes Seconds or Hours Minutes is selected as the time range Timing Dire...

Page 38: ...and P keys If inactive Off the timing operation can only be reset through the remote input Security Level 4 different levels of security are available 0 Full Access 1 SP locked out 2 Access to Program Mode only by holding the P key for 10 seconds 3 SP Locked Out and access to Program Mode only by holding the P key for 10 seconds ...

Page 39: ...FREQUENCY ELECTROMAGNETIC FIELD IMMUNITY TEST EN61000 4 4 95 ELECTROMAGNETIC COMPATIBILITY EMC PART 4 TESTING AND MEASUREMENT TECHNIQUES SECTION 4 ELECTRAL FAST TRANSIENT BURST IMMUNITY TEST BASIC EMC PUBLICATION EN61000 4 5 95 ELECTROMAGNETIC COMPATIBILITY EMC PART 4 TESTING AND MEASUREMENT TECHNIQUES SECTION 5 SURGE IMMUNITY TEST EN61000 4 6 96 ELECTROMAGNETIC COMPATIBILITY EMC PART 4 TESTING AN...

Page 40: ...d P N 102760 Table Motion Potentiometer 2 Position Switch P N 101773 2 Position Switch P N 101773 Panel Mount Jack 2 5 P N 101167 12VDC Motor P N 101158 2 Position Switch P N 101773 Lighted Switch P N 101774 Potentiometer Control Board P N 102301 L1 L2 A A P2 P3 P1 Motor 1 8 hp 3 Position Switch P N 101884 ULTRAPOL ADVANCE Connection Board Connection side Core Outer RCA Jack P N 105192 LCD Moniter...