Ulvac DIS-251, Instruction Manual

Page 1: ...it to you Purchase date When you began operation This instruction manual includes very important warnings cautions and operating procedure in order to operate this pump safely and efficiently Be sure...

Page 2: ...ve the following meanings Examples of marks WARNING Indicates a potentially hazardous situation which if not avoided may result in serious injury or loss of life CAUTION Indicates a potentially hazard...

Page 3: ...or bodily injury due to turning objects Install overcurrent protective device Danger of accident fire and failure Be sure to install protective device to protect circuitry We recommend overcurrent pro...

Page 4: ...e it can cause failure or bodily injury by gas explosion or ignition Avoid foreign matter Danger of entanglement and foreign matter dispersal Never put finger or foreign matter into air hole of fan co...

Page 5: ...of problem Danger of problem recurrence and failure Ifprotectivedeviceorthermalprotectoractivates besuretoturnoffelectricsourceandinspect causestosolvetheproblem Donotoperateuntilproblemissolved Opera...

Page 6: ...ss than 10L min If not it can increase pressure inside vacuum pump resulting in failure Caution for frequent start stop and short interval Risk of motor malfunction Refrain from frequent start stop op...

Page 7: ...le If they become dirty or detached replace them with new ones If you need replacement stickers contact our sales branches who sold the vacuum pump to you DIS 251 Single phase DIS 251 Three phase DIS...

Page 8: ...lush opened operation 22 4 2 1 Preparation 22 4 2 2 Start up and shut down 23 4 2 3 When returning to air flush closed operation 23 5 Maintenance and inspection 25 5 1 Daily maintenance and inspection...

Page 9: ...rdered How to read model name D I S 2 5 1 D I S 5 0 1 Check that there is no damage If there is any damage contact either our sales branches who sold it to you or local sales offices Check the followi...

Page 10: ...inside DIS 251 DIS 501 Please prepare electric source cables crimp style terminal electric source protective devices piping to inlet and piping from outlet on customer side Serial number Alphabetic N...

Page 11: ...sufficient allowable load capacity DIS 501 mass 44kgs 1 phase 38kgs 3 phase while paying attention to stability of suspended load If not it can cause damage failure or bodily injury from falling carg...

Page 12: ...d by plug when shipping from factory Handle Hour Counter Fan Cover Motor Base Motor Turning Direction Plate Inlet NW40 IN Plate Air Flush Port Rc 1 8 It is closed by plug when shipping from factory Ou...

Page 13: ...t Install at a safe site CAUTION Danger of overheating Operate at ambient temperature of 5 40 Operating at a temperature range other than that designated can cause accident failure or bodily injury su...

Page 14: ...c wiring If not short circuit or electric shock can cause fire or bodily injury Ask qualified electrician Danger of electric shock and entanglement Be sure to turn off electric source on building site...

Page 15: ...ed Danger of short circuit and electric shock The power supply conductor shall be free from strain including twisting by using cord anchorage which is specified by the local electrical wiring regulati...

Page 16: ...ge can cause motor burnout Check voltage Danger of problem recurrence and failure If protective device or thermal protector activates be sure to turn off electric source and inspect causes to solve th...

Page 17: ...t is wired to 200V when shipping from factory If you want to change to a 100V or 400V connection remove M4 nut of electric source terminal and change terminal plate as illustrated below Connect electr...

Page 18: ...emove blank flanges 2 places from inlet and outlet of vacuum pump Check turning direction Open inlet turn on electrical source to start operating vacuum pump Vacuum pump turns clockwise when viewed fr...

Page 19: ...isolation valve which closes during power failure in order to prevent the drawback of debris inside pump into the vacuum chamber during power failure Use the clean connecting pipe between vacuum chamb...

Page 20: ...ut finger or foreign matter into air hole of fan cover air hole of motor or clearance between FS 1 and FS 2 cooling fins If done it can cause bodily injury from entanglement with turning section or fo...

Page 21: ...eration for at least one hour If you close air flush port or stop vacuum pump soon after evacuating vapor condensed water will remain inside vacuum pump which will cause failure Caution after exhausti...

Page 22: ...ot it can cause failure When doing air flush opened operation Noise level will increase by 7 8dB Install pump in an area which is not exposed to debris such as iron powder stone powder polish powder o...

Page 23: ...or You must shorten maintenance interval 5 2 page 26 when evacuating vapor since vapor temperature disposal volume disposal frequency and substances in vapor have an influence on pump operation When e...

Page 24: ...ation valve between vacuum pump and vacuum chamber during pump shut down If vacuum pump stops during air flush opened operation atmospheric air is drawn back from air flush port to inside of vacuum pu...

Page 25: ...24 DIS 251 DIS 501 Fit plug Remove air muffler Air flush port Air flush port Fit plug Remove air muffler...

Page 26: ...to conduct maintenance and inspection after you turn off electric source If not it can cause bodily injury from electric shock or turning object Turn off electric source Danger of accident failure an...

Page 27: ...aning Inside cleaning Inside cleaning Replace Replace if something goes wrong Note 1 Maintenance interval should be shorter than either the period or operating hours Note 2 When you want further maint...

Page 28: ...aust piping diameter and length Air outlet is clogged Remove blank flange from exhaust outlet Motor protection gear activates Air outlet is clogged Reset thermal protector Inspect and repair Ultimate...

Page 29: ...g system Air cooled Others With hour counter and air flush Note 1 Pumping speed and ultimate pressure should remain the same whether air flush system is used or not Note 2 Maximum voltage allowance is...

Page 30: ...oling system Air cooled Others With hour counter and air flush Note 1 Pumping speed and ultimate pressure should remain the same whether air flush system is used or not Note 2 Maximum voltage allowanc...

Page 31: ...30 8 2 Dimensions 8 2 1 DIS 251 8 2 2 DIS 501 Three phase Three phase Single phase Single phase Figures in parentheses are dimensions in case that Inlet and outlet are placed vertically...

Page 32: ...31 8 3 Performance data...

Page 33: ...mp Therefore any damage to the other products caused by a malfunction of this vacuum pump shall not be covered by the warranty This warranty is valid only in Japan 9 2 After sales and service Periodic...

Page 34: ...ring Trouble situation Unusual sound Pressure degradation Irregular action Others Purpose of the usage Device s name if necessary Evacuated gas Type of the gas Hazardous situations for injury Yes No T...