Ulvac GR60, Instruction Manual

Page 1: ...Manual Multiple Roots Type Dry Pump GR60 GR90 GR180 IE3 motor adoption ULVAC INC Components Division http www ulvac co jp Be sure to read the manual before using this product In addition keep it in a...

Page 2: ......

Page 3: ...ulations or if any changes are made to the product itself it may not be guaranteed to have its performance and safety We don t guarantee have no responsibility for such performance and safety Any prod...

Page 4: ...isused could result in operator s death or serious injury This indicates a potentially hazardous situation which if the product is misused may result in operator s moderate injury or serious damage to...

Page 5: ...fter a stop Do not exhaust any gas with these properties If toxic gas is sucked in the vacuum pump it goes without saying that not only the pump body but also the pump oil will be toxic Take care duri...

Page 6: ...erate cargo handling equipment 4 Unreasonable operation or insufficient maintenance of equipment may cause the pump to fall or turn over Never get under the pump Transportation 1 This product has cast...

Page 7: ...the pump in the event that the cooling water stops 2 Before starting work check that all dangerous energies are shut out 3 It is designed to prevent leakage under specified conditions and a leak test...

Page 8: ...cuum pump with any devices that cause clogging of the exhaust attached on the exhaust port side in such a way that they disturb the gas flow Otherwise the inner pressure of the vacuum pump may increas...

Page 9: ...sure to disconnect it from the power supply Cooling Water Piping Removal 1 For during operation and for some time after the operation stops do not touch the vacuum pump motor and pipes since they are...

Page 10: ...on manual of the device 2 For a while after the operation stops do not touch the intake and exhaust pipes since they are subjected to high temperature Remove after the pump temperature becomes low 3 F...

Page 11: ...around a point with this warning label Before the wiring and maintenance work be sure to turn off the power supply Be sure to close the cover of the terminal box For during operation and for some time...

Page 12: ...Instructions Manual Multiple Roots Type Dry Pump GR60 90 180 YK09 0023 DI 003 02 x GR60 GR90 GR180...

Page 13: ...ot perform cargo handling operation and operate cargo handling equipment 4 Unreasonable operation or insufficient maintenance of equipment may cause the pump to fall or turn over Never get under the p...

Page 14: ...GR60 128kg GR90 188kg GR180 268kg A load over the safety standard value is required for transportation and therefore you may strain your back Transport it by hanging with cargo handling equipment such...

Page 15: ...0m or lower 3 External vibration During storage During operation Vibration acceleration 0 5G 114 dB or lower 4 Others During storage During operation a Corrosive and explosive gas are not allowed b Fr...

Page 16: ...the power supply set it up via overload protective equipment according to the national and local safety laws and regulations at the site When selecting overload protective equipment see 3 7 Electric...

Page 17: ...ct specific Risk and Safety Measure 1 1 1 1 Intake and Exhaust of Hazardous Gas Substance 1 1 1 2 Transportation of heavy load items 1 1 1 3 Electric shock 2 1 1 4 High temperature 2 1 1 5 Rupture 2 1...

Page 18: ...ooling water pipe 27 6 3 Nitrogen gas pipe 28 6 4 Intake and exhaust pipe 28 7 Maintenance 29 7 1 Inspection 29 7 2 Operation after long term storage 29 7 3 Overhaul 29 7 4 Trouble Check List 31 8 Dis...

Page 19: ...onal contractor for the waste disposal to detoxify 3 Ask a waste disposal company with an administrative approval to dispose of the product You get injured by ignition explosion due to residual gas or...

Page 20: ...pes since they are subjected to high temperature 2 For a while after the operation stops do not touch the vacuum pump motor and pipes since they are subjected to high temperature Supply cooling water...

Page 21: ...his machine Carefully read to understand hazardous characteristics For the Material Safety Data Sheet please contact our sales department and get the latest version Do not use chemicals pump oil other...

Page 22: ...in the event that the amount of cooling water becomes lower than the specified value 2 1 Feature The GR series is a root type dry vacuum pump Two three lobe rotors rotating objects are in a box calle...

Page 23: ...lubrication chamber into the casing The power supply is a 200V or 400V class three phase power supply Check the motor specifications Be sure to attach overload protective equipment If not it may resul...

Page 24: ...re connection delta wire connection Y Y or Star wire connection Frequency Hz 50 60 Maximum exhaust velocity m3 hr L min 62 1033 80 1333 Maximum intake pressure Pa Atmospheric pressure Ultimate pressur...

Page 25: ...10 during the operation Gas flow rate SLM 5 0 3 Frequency Hz 50 60 Maximum exhaust velocity m3 hr L min 183 3100 237 3950 Maximum intake pressure Pa Atmospheric pressure Ultimate pressure Pa 5 0 1 Max...

Page 26: ...Instructions Manual Multiple Roots Type Dry Pump GR60 90 180 YK09 0023 DI 003 02 8 2 4 External Dimensional Drawing GR60...

Page 27: ...Instructions Manual Multiple Roots Type Dry Pump GR60 90 180 YK09 0023 DI 003 02 9 GR90...

Page 28: ...Instructions Manual Multiple Roots Type Dry Pump GR60 90 180 YK09 0023 DI 003 02 10 GR180...

Page 29: ...to have taken such trainings In addition the operator has expertise skills qualifications in electrics mechanics cargo handling vacuum etc 2 Before installing removing keep the product from all the e...

Page 30: ...h Wait for a while until the pump temperature becomes low and then perform inspection Otherwise you may get burned If it is used to exhaust hazardous gas it goes without saying that not only the pump...

Page 31: ...ight figure 1 Before starting work be sure to turn off the power supply During the work never turn on the power supply Otherwise you may get injured 2 Immediately after the operations stops the pump t...

Page 32: ...to turn off the power supply During the work never turn on the power supply Otherwise you may get injured 2 Immediately after the operations stops the pump temperature is high Wait for a while until...

Page 33: ...mmend connecting a bellows pipe 1 If the pump suctions solid substances or moisture such as dust and fine powder not only the ultimate pressure may deteriorate but also it is broken down 2 The metal n...

Page 34: ...ure oil leak may occur or the electric motor may be overloaded 1 For duct piping be sure to use conducting materials electricity can be conducted If a non conducting material is used static electricit...

Page 35: ...fications such as an abnormal pressure increase may cause leakage 2 Attach a feed valve to stop the supply of Nitrogen gas 3 Before removal of the nitrogen gas pipes close the feed valve of nitrogen g...

Page 36: ...needs to be cooled at all times by supplying a specified amount of flowing water Install a flow meter that can visually recognize the flow such as a flow sight to check that cooling water flows 4 Ins...

Page 37: ...r own responsibility Cooling water pipe inlet Cooling water pipe outlet Cooling water amount is equal to or lower than the specified value Shut out Leak detected Shut out Feed water valve Drain valve...

Page 38: ...ilure or electric leakage You are recommended further to install a dedicated earth leakage breaker 5 Minimize the length of the ground wire 6 Wire size please determined by considering the voltage dro...

Page 39: ...on please Reference Power supply connections Recommended system This system needs to be prepared at your own responsibility From flow sensor Cooling water amount is equal to or lower than the specifie...

Page 40: ...If overload protective equipment is not installed or it is installed but not suitable for the motor capacity a motor burnout or fire may occur We recommend installing protective equipment such as an e...

Page 41: ...f the electric motor 2 If the valve is installed in a pipe at the latter stage from the exhaust port check that it opens If toxic and combustible flammable gases other than inactive gas are discharged...

Page 42: ...e decreases If the motor rotates in the reverse direction the power phases are opposite from each other Replace the two of the three connection wires in Fig 6 5 After the completion of steps 1 to 4 st...

Page 43: ...shutting off the supply of cooling water immediately after the pump operation stops the cooling water remaining in the pump may boil with an inner pressure increase causing damage to the cooling wate...

Page 44: ...Instructions Manual Multiple Roots Type Dry Pump GR60 90 180 YK09 0023 DI 003 02 26 5 Pump Performance 5 1 Exhaust velocity Pressure Pa Exhaust velocity mm 3 h...

Page 45: ...r 3 This product uses vinyl tubes as cooling water pipes If the cooling water inlet or outlet is sealed and compressed air is supplied from the non sealed port the cooling water pipes may not be able...

Page 46: ...mospheric pressure before removing the nitrogen gas pipes If the inner pressure is high during the work there is a risk that the pipes may be disconnected with force and you may get injured Disconnect...

Page 47: ...peated start and stop operation is performed increase the frequency of inspection 7 2 Operation after long term storage After long term storage 3 months or longer or after the equipment has been stopp...

Page 48: ...seal 2 All models Coupling Spider All models O ring All models Teflon seal All models Vacuum pump oil All models Parts to be replaced every two years Parts Name Corresponding Model Bearing case All m...

Page 49: ...f the overload protective equipment 3 7 Motor failure Replace the motor Moisture solution etc were sucked and accumulated in the pump Rust occurred Overhaul Cleaning the inside of the pump removal of...

Page 50: ...es Replace the oil 3 2 7 1 There is leakage in the pipe to which the pump is connected Find the leak point using a device such as a leak detector and stop the leak Our genuine oil is not used After an...

Page 51: ...xhaust of toxic gas please ask a professional company to dispose of the pump Note that the disposal cost shall be borne by the customer 1 Especially after the exhaust of hazardous gas on a human body...

Page 52: ...es and defects due to exhaust of gas other than air or nitrogen or materials Failures and defects attributed to consumables If the product is used with a power supply other than that with power supply...

Page 53: ...ion to this document the contents in those documents prevail 2 Please let us know if you export this product from Japan and take necessary procedures according to the provisions of export related laws...

Page 54: ...ty period Table Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body indicating that content of the hazard...