Ulvac VPC-051, User Manual

Page 1: ...l thoroughly to ensure safe and effective operation of this equipment Keep this manual in a safe place Please note that due to performance upgrade the equipment described in this manual is subject to...

Page 2: ...vidual Unit Specifications 3 5 Standard Accessories 4 6 How to Use Switches Handles and Operation Levers 4 7 Layout of Switches Handles and Operation Levers 5 Evacuation system drawing Electrical syst...

Page 3: ...3 Removal Maintenance and Installation of Devices 12 3 1 Oil sealed rotary vacuum pump 12 3 2 Oil diffusion pump 12 3 3 Oil mist trap 13 4 Maintenance and Inspection Points 13 5 Troubleshooting 14 6 S...

Page 4: ...duced without permission of Ulvac Kiko Inc Read this section before using the VPC 051 Always follow the instructions below to safely use the device and prevent personal injuries from occurring The sym...

Page 5: ...rical shock in case of failure or current leakage Check the cable capacity Avoid using an extension cable However if it must be used by necessity use the following cable For 100 V power supply 1 25 mm...

Page 6: ...tion outlet of the oil sealed rotary vacuum pump during roughing operation Use an oil mist trap sold separately Otherwise oil spread may contaminate the room or affect human health Ventilate Pump is h...

Page 7: ...gen splashes and adheres to your skin you may feel acute pain momentary Confirm complete close After confirming complete closure of the main valve let out the air in the bell jar If air comes into the...

Page 8: ...than the above contact us Replace periodically Oil mist trap sold separately should be replaced every six months to one year Clogging in the element increases evacuation resistance which may cause oi...

Page 9: ...cations or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused by noise electric disturbance f Malfunctions that o...

Page 10: ...is vacuum pump unit as a vacuum vessel Reselling repairing and refurbishing of the product that are not permitted by us Avoid this action 2 Safety Device and its Purpose and Functions Item Purpose Fun...

Page 11: ...320 mm Height 461 mm Approx 20 kg Finished color Rack Panel baking finish Munsell 6Y 8 0 8 baking finish Munsell 6Y 8 0 8 4 Individual Unit Specifications Unit Model and Specifications Quantity 1 Oil...

Page 12: ...d Operation Levers Confirm Before handling switches handles or operation levers confirm the safety and conditions Name How to Operate MAIN switch Manual ON OFF BACK P switch Manual ON OFF ON lamp illu...

Page 13: ...5 7 Layout of Switches Handles and Operation Levers Evacuation system drawing 1 100V 0 63kVA Electrical system drawing...

Page 14: ...here the following conditions are satisfied 1 Flat surface 2 Floor with sufficient strength 3 Well ventilated place 4 Place without direct sunlight 5 Room with temperatures between 7 C and 30 C 6 Loca...

Page 15: ...g wire Employ Level D grounding The grounding wire is the green wire Use a plug with grounding wire for 100 V power supply If you use a plug adapter connect the grounding wire with a nearest grounding...

Page 16: ...es When using liquid nitrogen wear gloves to protect your hands If liquid nitrogen splashes and adheres to your skin you may feel acute pain momentary Confirm complete close After confirming complete...

Page 17: ...in valve flange CHECK 2 VENT V main valve CLOSE 3 Three way valve ROUGH 13pa or less CHECK 4 Three way valve FORE 5 Main valve COMPLETE CLOSE 6 When an ionization gauge is use Filament ON 2 3 Stop Vac...

Page 18: ...ressure for about 30 minutes This is not a failure Close the MAIN valve to prevent inside of the bell jar from contamination 3 Measures upon Abnormal Conditions 3 1 Instantaneous power outage All devi...

Page 19: ...tion resistance which may cause oil leakage from the axis sealing area or oil level gauge damage Work by two or more people Installation and removal of the oil diffusion pump and oil sealed rotary vac...

Page 20: ...oval procedure All devices of the coater stop Confirm The primary power supply of the coater is removed Confirm VENT V of roughing piping is open Confirm Three way valve FORE Leave the inside of the D...

Page 21: ...nce and Inspection Points Unit Maintenance and Inspection Timing of Maintenance and Inspection Oil sealed rotary vacuum pump Confirm that the oil level of the oil level gauge is within the indicated l...

Page 22: ...ect air intake leakage etc replace the oil Failure in the oil sealed vacuum pump Refer to the Oil Sealed Vacuum Pump User s Manual Failure in measuring instrument Replace the measuring instrument The...

Page 23: ...OK O ring for leakage valve N 8 NBR 1 OK Oil diffusion pump Gasket for suction flange 57 48 t5 NBR 1 OK Oil for use SY 0 02L OK Mica heater Single phase 100 V 0 25 kW 1 NG Vacuum hose for MAIN P 12 30...

Page 24: ...this action Do not use other manufacturer s optional parts for modification We do not assume any responsibility for any damage due to such modifications 1 Standard Optional Parts List Name of optional...