Ulvac VPC-061A, User Manual

Page 1: ...se read this manual thoroughly to ensure safe and effective operation of this equipment Keep this manual in a safe place Please note that due to performance upgrade the equipment described in this man...

Page 2: ...andard Accessories 5 6 How to Use Switches Handles and Operation Levers 5 7 Layout of Switches Handles and Operation Levers 6 Evacuation system drawing Electrical system drawing 3 Opening the Package...

Page 3: ...ce and Repair that Can be Made by User 14 3 Removal Maintenance and Installation of Devices 15 3 1 Oil sealed rotary vacuum pump 15 3 2 Oil diffusion pump 15 3 3 Oil mist trap 16 3 4 O ring at gas bel...

Page 4: ...duced without permission of Ulvac Kiko Inc Read this section before using the VPC 061A Always follow the instructions below to safely use the device and prevent personal injuries from occurring The sy...

Page 5: ...unding wire for 100 V power supply If you use a plug adapter connect the grounding wire with a nearest grounding terminal If incorrect grounding is made this may cause electrical shock in case of fail...

Page 6: ...tion outlet of the oil sealed rotary vacuum pump during roughing operation Use an oil mist trap sold separately Otherwise oil spread may contaminate the room or affect human health Ventilate Pump is h...

Page 7: ...iciency accident Caution Wear gloves When using liquid nitrogen wear gloves to protect your hands If liquid nitrogen splashes and adheres to your skin you may feel acute pain momentary Confirm complet...

Page 8: ...ter of the oil diffusion pump 5 Cleaning of the inside of the base plate and the glass bell jar To make repair or maintenance other than the above contact us Replace periodically Oil mist trap sold se...

Page 9: ...caused by modifications or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused by noise electric disturbance f Ma...

Page 10: ...materials other than evaporation materials and sample materials in the glass bell jar Reselling repairing and refurbishing of the product that are not permitted by us Avoid this action 2 Safety Device...

Page 11: ...100 V 0 63 kVA Single phase 200 V 1 5 kVA External dimensions Main unit Weight Main unit Width 434 mm Depth 422 mm Height 673 mm Approx 32kg Finished color Rack Panel baking finish Munsell 6Y 8 0 8 b...

Page 12: ...Model DPF 050 Evacuation speed 50 L sec Ultimate pressure 10 5 Pa Evacuation or VG 25 or equivalent suction opening 13 6 or equivalent Required power 0 25 kVA Oil for use SY 0 02L 1 set 5 Oil sealed...

Page 13: ...firm Before handling switches handles or operation levers confirm the safety and conditions Name How to Operate MAIN switch Manual ON OFF AUTO switch Manual ON OFF ON lamp illumination MAIN P lamp Man...

Page 14: ...6 7 Layout of Switches Handles and Operation Levers Evacuation system drawing Electrical system drawing...

Page 15: ...here the following conditions are satisfied 1 Flat surface 2 Floor with sufficient strength 3 Well ventilated place 4 Place without direct sunlight 5 Room with temperatures between 7 C and 30 C 6 Loca...

Page 16: ...Ground the grounding wire Employ Level D grounding The grounding wire for 200 V power supply is the green wire Use a plug with grounding wire for 100 V power supply If you use a plug adapter connect t...

Page 17: ...output power cable 6 How to change the Oil cap into Exhaust cap 1 Twist the black oil cap to the left and remove it Oil cap 2 Mount the Exhaust cap attached with the pump Exhaust cap 3 After changing...

Page 18: ...quid nitrogen wear gloves to protect your hands If liquid nitrogen splashes and adheres to your skin you may feel acute pain momentary Confirm complete close After confirming complete closure of the m...

Page 19: ...l in volume Approx 0 4 liters including vaporization volume upon fill in The liquid nitrogen lasts approx 4 hours when a volume of 0 4 liters is filled If all of the liquid nitrogen is vaporized the t...

Page 20: ...nt OFF 2 Main valve COMPLETE CLOSE 3 Three way valve FORE Confirm 4 VENT V of Main Valve when necessary Open gradually 3 2 Vacuum evacuation of bell jar 1 VENT V of Main Valve CLOSE 2 Bell jar Install...

Page 21: ...the shutter so as to remove them 9 Open the shutter and form the film on the material substrate 10 Run evaporation test 11 After film is formed close the shutter 12 POWER Lamp off OFF 13 Evaporation p...

Page 22: ...rately should be replaced every six months to one year Clogging in the element increases evacuation resistance which may cause oil leakage from the axis sealing area or oil level gauge damage Work by...

Page 23: ...fusion pump 1 Required tool 13mm Spanner x 1 2 Removal procedure All devices of the coater stop Confirm The primary power supply of the coater is removed Confirm Remove the Mate N Lock for the heater...

Page 24: ...n Tighten with the O ring held 3 4 O ring at gas bell jar 1 Required tools None 2 Removal procedure Remove the O ring In this case do not cause any damage on the O ring groove 3 Order of attachment Ap...

Page 25: ...f the ultimate pressure and the exhaust time is changed after an incorrect air intake If the ultimate pressure and the exhaust time is changed after long years of continuous use As necessary Cooling f...

Page 26: ...ge the material Take longer evacuation time Failure in the oil sealed vacuum pump Refer to the Oil Sealed Vacuum Pump User s Manual Failure in measuring instrument Replace the measuring instrument The...

Page 27: ...ring for hermetic sealing P 26 NBR 1 OK O ring for shutter N 8 NBR 1 OK Electrode pole gasket KV 1020 01 019 FPM 2 OK Main valve O ring for suction flange V 40 NBR 1 OK O ring for exhaust flange P 12...

Page 28: ...flange V 24 NBR 1 OK Liquid nitrogen trap O ring for suction flange V 40 NBR 1 OK Specifications and quantity is different for special models 6 Disposal 1 Cautions upon Disposal Caution Comply with re...

Page 29: ...der Secure the evaporation power Installable by user Filament Evaporation power Installable by user 140 material holder Fixing material Installable by user 8P Hermetic Terminals for energizing Install...