Varian TV 1001 SEM, Instruction Manual

Page 1: ... 8978 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87 900 973 01 SEPTEMBER 2003 ...

Page 2: ...TV 1001 SEM ...

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Page 5: ...Communication Format 32 Communication Protocol 32 Window Meanings 34 INLET SCREEN INSTALLATION 35 AIR COOLING KIT INSTALLATION 36 TV 1001 SEM with Navigator Controller 36 TV 1001 SEM Pump with Standard Rack Controller 36 WATER COOLING KIT INSTALLATION 37 VENT ACCESSORIES 38 TV 1001 SEM Controller Compatible 38 Standard Rack Controller Compatible 39 VIBRATION ISOLATOR INSTALLATION 39 Single Damper ...

Page 6: ...immagazzinamento delle pompe non devono essere superate le seguenti con dizioni ambientali temperatura da 20 C a 70 C umidità relativa da 0 a 95 non condensante il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomoleco lare è di 10 mesi dalla data di spedizione ATTENZIONE ...

Page 7: ...lla pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attra verso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas aggressivi queste pompe sono dotate di una apposita porta attraverso la quale è necessario fornire alla pompa un flusso di gas inerte Azoto o Argon per proteg gere i cuscinetti vedere l appen...

Page 8: ...ten Während des Transports der Handhabung und der Einla gerung der Pumpen dürfen die folgenden Grenzwerte nicht überschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Emp fang bei Erstinbetriebnahme stets im Modus Soft Start in gangzusetzen Die Lagerdauer für eine Turbomolekularpumpe beträgt 10 Monate...

Page 9: ...gungen an der Turbopumpe zu vermeiden da die Lager beschädigt werden könnten Für die Belüftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Belüf tungsanschluß soll unter 2 bar über dem atmosphärischen Druck betragen Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer Öffnungsklappe ausgestattet über die zum Schutz der Lager Inertgas Sticksto...

Page 10: ...cter les instructions suivantes Le transport la manutention et le stockage des pompes doivent impérativement avoir lieu dans les conditions am biantes suivantes température de 20 C à 70 C humidité relative de 0 à 95 non condensante A la première utilisation les pompes turbomoléculaires doivent toujours être mises en marche en mode soft Start Le temps de stockage d une pompe turbomoléculaire est de...

Page 11: ... air de la pompe utiliser de l air ou du gaz inerte exempt de poussière ou de particules La pression d entrée à travers la porte prévue à cet effet doit être inférieure à 2 bar au delà de la pression atmosphérique Pour le pompage de gaz agressifs ces pompes sont dotées d une porte spéciale à travers laquelle il est nécessaire de four nir à la pompe un flux de gaz inerte azote ou argon pour pro tég...

Page 12: ...e las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deberá activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el período máximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de envío al cliente ATENCIÓN En caso ...

Page 13: ...e la bomba utilizar aire o gas inerte sin polvo o partículas La presión de entrada a través de la puerta deberá ser inferior a 2 bar por encima de la presión atmosférica Para bombear gases agresivos estas bombas están dotadas de una puerta específica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitrógeno o Argón para proteger los rodamientos véase el anexo Technical...

Page 14: ...enagem das bombas as condições ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 não condensante ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativá las sempre em modalidade Soft Start o tempo máximo de armazenagem de uma bomba turbomolecular é de 10 meses a contar da data da expedição ATENÇÃO Se por uma razão qualquer o período de arm...

Page 15: ...ás inerte sem poeiras ou partículas A pressão de entrada através da porta específica deve ser inferior a 2 bar acima da pressão atmosférica Para bombear gases agressivos estas bombas estão equipadas com uma porta específica através da qual é necessário fornecer à bomba um fluxo de gás inerte Azoto ou Argon para proteger os rolamentos consultar o apêndice Technical Information PERIGO Quando a bomba...

Page 16: ...sing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzend...

Page 17: ... kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van agressieve gassen van een speciale poort voorzien waardoor de pomp een stroom inert gas stikstof of argon ter bescherming van de lagers ...

Page 18: ...ekylære pumper fra Varian Sørg for at omgivelserne opfylder følgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte de turbomolekylære pumper ved hjælp af Soft Start funktionen ved modtagelse og start af pumperne for første gang De turbomolekylære pumper må opbevares ...

Page 19: ...mmenstød vibrationer eller bratte bevægelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller ædelgasser der ikke indeholder støv eller faste partikler Indgangstrykket ved den specielle dør skal være mindre end 2 bar over atmosfærisk tryk I forbindelse med pumpning af aggressive gasser er disse pumper udstyret med en dør igennem hv...

Page 20: ... och driftsäkerhet för Varian turbomolekylära pumpar Vid transport flytt och lagring av pumparna ska följande omgivningsförhållanden respekteras Temperaturområde 20 C till 70 C Relativ fuktighet 0 till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekylära pumparna när de mottas och sätts i drift för första gången De turbomolekylära pumparna kan lagras i 10 månader från leveransdatumet VI...

Page 21: ...r av turbopumpen när den är igång Lagren kan bli skadade Pumpen ska förses med luft eller med ädelgaser som ärfria från damn eller andra partiklar Ingångstrycket mot rätt dörr måsteunderstiga 2 bar utöver det atmosfäriska trycket För pumpning av frätande gaser är dessa pumpar försedda med en speciell öppning igenom vilken man ska leda en ström av ädelgas kväve eller argon för att skydda lagren se ...

Page 22: ...de anvisninger følges Under transport flytting og lagring av pumpene må ikke følgende miljøforhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden må alltid soft starte de turbomolekylære pumpene når de mottas og startes opp første gang Lagringstiden for en turbomolekylær pumpe er 10 måneder fra sendedato FORSIKTIG Hvis lagringstiden av en hvilken so...

Page 23: ...utselige bevegelser av turbinpumpen når den er i funksjon Lagrene kan skades Bruk støv og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen må ikke være mindre enn 2 bar over atmosfærisk trykk Ved pumping av etsende gasser er disse pumpene utstyrt med en spesiell åpning Til denne åpningen skal flyt av inaktive gasser argon eller kvelstoff koples for å beskytte lagr...

Page 24: ...sti ja luotettavasti Kun pumppua kuljetetaan siirretään ja varastoidaan seuraavia ympäröiviä olosuhteita ei tule ylittää lämpötila 20 C 70 C suhteellinen kosteus 0 95 ei tiivistävä Asiakkaan tulee aina käynnistää turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja käyttäessään sitä ensimmäisen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimituspäivästä HUOM...

Page 25: ...a Erityisen aukon läpi syötettävän paineen tulee olla alle 2 baaria yli atmosfäärisen paineen Pumput on varustettu aggressiivisten kaasujen pumppausta varten aukolla jonka läpi pumppuun kuljetetaan jalokaasuja typpi tai argon laakereiden suojaamiseksi katso Tekniset tiedot liite VAARA Kun pumppua käytetään myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle...

Page 26: ... twn antlièn den pr pei na uperba nontai oi exÿj periballontik j sunqÿkej qermokras a apÒ 20 C wj 70 C scetikÿ ugras a apÒ 0 wj 95 mh sumpuknèsimh o pel thj pr pei na an bei tij strobilomoriak j antl ej me ton trÒpo Soft Start Òtan paralamb nontai kai q tontai se leitourg a gia prèth for o crÒnoj apoqÿkeushj m aj strobilomoriakÿj antl aj e nai 10 mÿnej apÒ thn hmeromhn a apostolÿj PROSOCH E n gia ...

Page 27: ... Gia na dioceteÚsete me a ra thn antl a crhsimopoie te a ra ÿ adran j a rio kaqarÒ apÒ skÒnh ÿ lla stoice a H p esh eisÒdou diam sou thj eidikÿj pÒrtaj pr pei na e nai mikrÒterh apÒ 2 bar p nw apÒ thn atmosfairikÿ p esh Gia thn ntlhsh polemikèn aer wn aut j oi antl ej e nai efodiasm nej me mia eidikÿ qur da m sw thj opo aj e nai anagka a h dioc teush adranoÚj aer ou Azwto ÿ ArgÒ gia na prostateuto...

Page 28: ...g moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time by the cus tomer the shelf life of a turbomolecular pump is 10 months from the shipping date CAUTION If for any reason the shelf l...

Page 29: ...or venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like N2 Ar for pump bearing protection see the appendix Technical Informa tion WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required proc...

Page 30: ...a blade angle of 28 4th and 5th stages with a blade angle of 24 6th stage with a blade angle of 20 7th and 8th stages with a blade angle of 16 The Macrotorr stages are in the form of four discs The turbine rotor is supported by permanently lu bricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are made of stainless steel These...

Page 31: ... Operating position Any Operating ambient temperature 5 C to 35 C Bakeout temperature 80 C at inlet flange max Vibration level Data measured with an indicated bearing temperature of 20 C see vibration graph in the following figure bearing peak 45 mm sec 2 residual unbalance 350 mm sec 2 see the following typical vibration graph Lubricant permanent lubrication Cooling require ments Forced air or wa...

Page 32: ...INFORMATION Typical Vibration Spectrum TV 1001 SEM OUTLINE The following figure shows the TV 1001 SEM outlines dimensions are in mm inches Turbo 1001 V Macro Torr Torr SEM V Turbo SEM 1001 Macro 27 87 900 973 01 ...

Page 33: ...MATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 28 87 900 973 01 ...

Page 34: ...STOP IN 2 START STOP IN 3 INTERLOCK IN 4 INTERLOCK IN 5 SPEED SETTING IN 6 SPEED SETTING IN 7 SOFT START IN 8 SOFT START IN 9 24 Vdc OUT 10 SPARE 11 PROGRAMMABLE SET POINT OUT 12 SPARE 13 FAULT OUTPUT OUT 14 PROGRAMMABLE ANALOG SIGNAL OUT 15 GROUND PROGRAMMABLE ANALOG SIGNAL OUT Signal description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP si...

Page 35: ...level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the cur rent drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity frequency threshold 500 Hz hysteresis 1 activation type high level The set point output stays at 0 Vdc until the fre quency bec...

Page 36: ...input of TV 1001 SEM to an exter nal system Two cases are considered 1 the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open col lector pin are available Case 1 Case 2 with relay utilisation Case 2 with transistor utilisation 31 87 900 973 01 ...

Page 37: ...ure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navi gator software Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 9600 pro grammable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Contro...

Page 38: ...f the MESSAGE NOTE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS ADDR Examples Command START Source PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP So...

Page 39: ...cycle time cycle num ber reset To reset write 1 110 R W L Interlock type default 1 Impulse 0 Continuous 1 N Read Write Data Type Description Admitted Values 111 R W L Analog out put type output volt age signal proportional to frequency or power 0 frequency 1 power default 0 120 R W N Rotational frequency setting Hz 150 to 650 default 650 121 R W N Maximum rotational frequency in Hz active only in ...

Page 40: ...d by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 3 These commands remove the pump motor supply for a short time If they are used con tinuously they can cause the pump stopping 7 6 5 4 3 2 1 0 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP AUX F...

Page 41: ...imensions 127x127x38 mm 5 x 5 x 1 5 in power 4 7 W The fan bracket is shaped so that it can be mounted close to the pump To fix the fan to the TV 1001 SEM case execute the following procedure see the following figure 1 Fix the fan to the suitable bracket by means of the furnished screws 2 Fix the bracket to the pump body between the pump and the controller 3 Connect the fan supply to the P4 connec...

Page 42: ...N Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbers are 969 9337 metallic model and 969 9347 plastic model Model 969 9337 Model 969 9347 CAUTION The items of the plastic model kit must be assem bled as shown in the following figure The assembled kit must be screwed into the su...

Page 43: ...NT ACCESSORIES The vent valve and vent device allow to avoid un desired venting of the pump during temporary power failure and enables an automatic vent op eration TV 1001 SEM Controller Compatible Vent Valve mod 969 9834 This vent valve waits before opening a minimum time of about 5 sec This time can be increased up to about 220 min by means of a setting of the Navigator software optional To inst...

Page 44: ... and lock the vent device in position using the KF klamp VIBRATION ISOLATOR INSTALLATION Single Damper Two vibration isolators for ISO 200K and ISO 200F inlet flange version pumps are available as acces sories The two model part numbers are the following model 969 9346 for ISO 200K flange model 969 9374 for ISO 200F flange They typically reduce the vibration transmitted from the TV 1001 SEM to the...

Page 45: ...adial is perpendicular to it PURGE VALVE INSTALLATION A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure and then screw the gas purge valve with a torque of 2 5 Nm as shown in the following figure SERIAL CABLE...

Page 46: ...on the interlock signal to start the pump Side mounting NOTE The L shaped bracket P N 969 9298 is available as an option See the following figure 1 Place the L shaped bracket on the controller with the pump cable toward the bracket and fix it by means of the three socket head screws M5 the washers and the nuts The 6 holes on the bracket allows to mount the con troller with the rotation angle that ...

Page 47: ...11 Connection for water cooling 12 Roughing line with valve optional 13 Turbopump 14 Fan 15 Flexible connection With Standard Rack Controller 1 Turbo V standard rack controller 2 Vent valve 3 Vacuum pump shut off valve optional 4 System vent valve optional 5 Vacuum chamber 6 Ionization gauge 7 Fore vacuum pump connecting flange 8 Oil mist eliminator 9 Fore vacuum pump with internal one way valve 1...

Page 48: ...he units and tighten each one in turn Re peat the sequential tightening until the flange faces meet CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock Connection B FORE VACUUM PUMP A flange KF 40 NW is available to connect the TV 1001 SEM pump to the fore vacuum pump A hose or vacuum approved pipe can be used If a r...

Page 49: ...ents Please contact Var ian for specific applications The purge gas throughput with the recommended forepump of 15 m3 h 11 CFM allows to achieve a high vacuum pressure in the 10 8 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and...

Page 50: ...be generated and ap plied to the rotor ACCESSORIES AND SPARE PARTS DESCRIPTION PART NUMBER Navigator Controller 969 8978 Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and Navigator Software 969 9883 Bracket for controller side mounting 969 9298 Inlet screen ISO 200 969 9316 Water cooling kit plastic model 969 9347 Water cooling kit metallic model 96...

Page 51: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Page 52: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

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