Varian TV 301 Navigator 969-8918, Instruction Manual

Page 1: ...8 969 8829 969 8830 969 8831 Controller model 969 8972 969 8973 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUK...

Page 2: ...TV 301 Navigator...

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Page 5: ...Communication Format 33 Communication Protocol 33 Window Meanings 35 INLET SCREEN INSTALLATION 36 HEATER BAND INSTALLATION 37 AIR COOLING KIT INSTALLATION 38 TV 301 with Navigator Controller 38 WATER...

Page 6: ...servate le seguenti prescri zioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti condi zioni ambientali temperatura da 20 C a 70 C umidit r...

Page 7: ...raverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas aggressivi queste pompe sono dotate di una apposita porta attraverso la quale necessario f...

Page 8: ...rian Tur bomolekularpumpen zu gew hrleisten sind die folgenden Anweisun gen zu beachten W hrend des Transports der Handhabung und der Einlage rung der Pumpen d rfen die folgenden Grenzwerte nicht bers...

Page 9: ...artikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel ftung sanschlu soll unter 2 bar ber dem atmosph rischen Druck betra gen Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer f...

Page 10: ...le de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doi vent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C hum...

Page 11: ...de la pression atmosph rique Pour le pompage de gaz agressifs ces pompes sont dot es d une porte sp ciale travers laquelle il est n cessaire de fournir la pompe un flux de gaz inerte azote ou argon p...

Page 12: ...e las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start...

Page 13: ...das de una puerta espec fica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Arg n para proteger los rodamientos v ase el anexo Technical Information PELIGRO C...

Page 14: ...servadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 n o...

Page 15: ...ica deve ser inferior a 2 bar acima da press o atmosf rica Para bombear gases agressivos estas bombas est o equipadas com uma porta espec fica atrav s da qual necess rio fornecer bomba um fluxo de g s...

Page 16: ...wbaarheid van de Turbomoleculaire pompen van Varian te garanderen moeten de volgende voorschriften in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende om...

Page 17: ...e luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen Deze pompen zijn vo...

Page 18: ...i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumper ved hj...

Page 19: ...indelse med pumpning af aggressive gasser er disse pumper udstyret med en d r igennem hvilken det er n dvendigt at forsyne pumpen med delgasser kv lstof eller argon for at beskytte lejerne se bilaget...

Page 20: ...ng av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet 0 till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de...

Page 21: ...ning av fr tande gaser r dessa pumpar f rsedda med en speciell ppning igenom vilken man ska leda en str m av delgas kv ve eller argon f r att skydda lagren se bilagan Technical information VARNING D p...

Page 22: ...nde milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gan...

Page 23: ...ser er disse pumpene utstyrt med en spesiell pning Til denne pningen skal flyt av inaktive gasser argon eller kvelstoff koples for beskytte lagrene se Teknisk informasjon ADVARSEL N r pumpen brukes fo...

Page 24: ...tt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan...

Page 25: ...sten kaasujen pumppausta varten aukolla jonka l pi pumppuun kuljetetaan jalokaasuja typpi tai argon laakereiden suojaamiseksi katso Tekniset tiedot liite VAARA Kun pumppua k ytet n myrkyllisten palohe...

Page 26: ...me ton tr po Soft Start tan paralamb nontai kai q tontai se leitourg a gia pr th for o cr noj apoq keushj m aj strobilomoriak j antl aj e nai 10 m nej ap thn hmeromhn a apostol j PROSOCH E n gia opoio...

Page 27: ...KINDUNOS Otan h antl a crhsimopoie tai gia thn ntlhsh toxik n e flektwn radienerg n aer wn akolouqe te tij kat llhlej carakthrhstik j diadikas ej tou k qe aer ou Mh crhsimopoie te thn antl a parous a...

Page 28: ...perature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf...

Page 29: ...ploying the pump for pumping toxic flammable or ra dioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases Switching on and Use o...

Page 30: ...2nd stage with a blade angle of 28 3rd stage with a blade angle of 24 Model 969 8830 with ISO 160 high vacuum flange and 120 220 Vac controller 4th and 5th stages with a blade angle of 20 6th 7th and...

Page 31: ...Foreline flange KF16 NW KF25 optional Rotational speed 56000 RPM Start up time 3 minutes Recommended forepump mechanical Varian SD 300 diaphragm Varian MD 60 Operating position any Cooling requiremen...

Page 32: ...owing figures show the TV 301 Navigator outlines dimensions are in inches mm When the TV 301 Navigator has been stored at a temperature less than 5 C wait until the system has reached the above mentio...

Page 33: ...TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure 28 87 900 946 01 B...

Page 34: ...TECHNICAL INFORMATION Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump Graph of nitrogen throughput test 29 87 900 946 01 B...

Page 35: ...3 FAULT OUTPUT OUT 14 PROGRAMMABLE ANALOG SIGNAL OUT 15 GROUND PROGRAMMABLE ANALOG SIGNAL OUT P3 Vent This is a dedicated 24 Vdc connector to control the optional vent valve P4 External fan Signal des...

Page 36: ...s a voltage from 0 to 10 Vdc propor tional to a reference quantity frequency or power set by the user The default setting is the fre quency see the following example diagram NOTE The Navigator Softwar...

Page 37: ...ons of the open collector input of TV301 Navigator to an external system Two cases are considered 1 the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the c...

Page 38: ...l output connection P2 Serial Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 9600 pro grammable Communication Protocol The communication protocol is a MASTER SLAVE t...

Page 39: ...02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START ON Source PC Destination Controller ETX End of transmission 0x03 CRC XOR of all characters subsequent to STX and including the ETX terminator...

Page 40: ...output type output volt age signal propor tional to frequency or power 0 frequency 1 power default 0 120 R W N Rotational fre quency setting Hz 150 to 963 default 963 N Read Write Data Type Descripti...

Page 41: ...alve is immediately closed The inlet screens mod 969 9302 and 969 9303 prevent the blades of the pump from being dam aged by debris greater than 0 7 mm diameter 2 On command means that the vent valve...

Page 42: ...nd must be mounted such that there is perfect thermal contact with the pump wall to obtain fast and efficient heating The following figure shows the overall flange di mensions with the protection scre...

Page 43: ...x the bracket to the pump body between the pump and the controller AIR COOLING KIT INSTALLATION 3 Connect the fan supply to the P4 connector of the controller TV 301 with Navigator Controller An air c...

Page 44: ...hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or us ing a closed circu...

Page 45: ...the thread on the pump To install the vent valve unscrew the threaded plug see figure below Then connect the cable from the valve to the suit able connector on the controller see the preced ing parag...

Page 46: ...fac tor of 20 The vent device has adjustable delay time up to 36 min To install the vent device unscrew and remove the threaded plug see figure below Please refer to the relevant instruction manual P...

Page 47: ...the bottom of pump 3 Place the controller on the studs aligning the 4 rubber holes on the top of the controller case 4 Press the controller towards the pump SERIAL CABLE INSTALLATION The supplied ser...

Page 48: ...holes on the pump bottom 7 Rotate the bracket until the controller is on the chosen position 8 Tighten the screws properly 1 Turbo V Navigator controller 9 Turn the pump again 2 Vent valve 10 Plug the...

Page 49: ...eliminator 9 Fore vacuum pump with internal one way valve 10 Fore vacuum pump control relay For ConFlat flange connections we recommend using Varian hardware 11 Connection for water cooling 12 Roughin...

Page 50: ...oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming The turbopump is conn...

Page 51: ...h 11 CFM allows to achieve a high vacuum pressure in the 10 8 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pres sure The recommended procedure...

Page 52: ...ight be generated and applied to the rotor ACCESSORIES AND SPARE PARTS DESCRIPTION PART NUMBER Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and Naviga...

Page 53: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Page 54: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Page 55: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...